Experimental and Theoretical Dynamic Investigation of MEMS Polymer Mass-Spring Systems

Khlifi, Awatef; Ahmed, Aftab; Pandit, Shubha; Mezghani, Brahim; Patkar, Rajul; Dixit, Pradeep; Baghini, Maryam Shojaei

doi:10.1109/jsen.2020.2996802

Cited by 2 publications

(1 citation statement)

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“…In these designs, the springs are normally composed of the straight beams [1] and a few designs employed the serpentine beam for extending the movement in the 𝑥 and 𝑦 axes [10]. For the rotational motion, the straight beam and serpentine springs have also been used [18][19][20][21][22]. In general, the component spring elements are independent to each other, one end of component spring element connected to a proof-mass/structure while the other is fixed to substrate or connected to another structure.…”

Section: Introductionmentioning

confidence: 99%

Archive of Mechanical Engineering

2022

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In this paper, a spring system symmetrically arranged around a circular plate compliant to out-of-plane oscillation is proposed. The spring system consists of single serpentine springs mutually coupled in a plane. Three theoretical mechanical models for evaluating the stiffness of the spring system are built, which are based on the flexural beam, Sigitta, and serpentine spring theories and equivalent mechanical spring structure models. The theoretically calculated results are in good agreement with numerical solutions using the finite element method, with errors less than 10% in the appropriate dimension ranges of the spring. Compared to similar spring structures without mechanical coupling, the proposed mechanically coupled spring shows advantage in suppressing the mode coupling.

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