1994
DOI: 10.1109/17.293381
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Increasing profitability and improving semiconductor manufacturing throughput using expert systems

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Cited by 3 publications
(2 citation statements)
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“…The amounts of data involved make the data analysis task extremely time-consuming and difficult. Several authors proposed procedures for using machinelearning techniques in semiconductor manufacturing [141][142][143][144][145][146][147]. Research results showed that machinelearning techniques can be powerful tools for continuous quality improvement in a large and complex process such as semiconductor manufacturing.…”
Section: Applications Of Machine-learning Techniques In Manufacturingmentioning
confidence: 99%
“…The amounts of data involved make the data analysis task extremely time-consuming and difficult. Several authors proposed procedures for using machinelearning techniques in semiconductor manufacturing [141][142][143][144][145][146][147]. Research results showed that machinelearning techniques can be powerful tools for continuous quality improvement in a large and complex process such as semiconductor manufacturing.…”
Section: Applications Of Machine-learning Techniques In Manufacturingmentioning
confidence: 99%
“…Ž . Burggraaf, 1996 , and expert systems to provide estimates on quality of certain batches Khera et al, 1994 . This literature is vital to continued technological progress in these industries. As new products and processes push the state of the art, yields fall, and new cycles of yield improvement are needed.…”
Section: Prior Research On Yieldsmentioning
confidence: 99%