1989
DOI: 10.1088/0022-3735/22/9/014
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In situ measurements of the stress changes in thin-film electrodes

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Cited by 18 publications
(15 citation statements)
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“…Fairly sophisticated methods for tracking this deflection have been developed in the last 20 years. The more popular make use of interferometry, , capacitance measurements, laser beam reflection, and scanning tunneling microscopy/atomic force microscopy. …”
Section: Introductionmentioning
confidence: 99%
“…Fairly sophisticated methods for tracking this deflection have been developed in the last 20 years. The more popular make use of interferometry, , capacitance measurements, laser beam reflection, and scanning tunneling microscopy/atomic force microscopy. …”
Section: Introductionmentioning
confidence: 99%
“…Curvature measurements (basics and applications of the LBPD [23][24][25][26][27][28][29] and basics and applications of the MOSS [30][31][32][33][34][35][36][37][38])…”
Section: Methods Advantages Disadvantagesmentioning
confidence: 99%
“…In 1989, Scarminio et al [24] first built the LBPD as shown in Figure 2a based on the Stoney equation to measure the curvature evolution of a Pd electrode during a variety of electrochemical reactions. The He-Ne laser generator produces a laser beam striking on the beam reflector, the reflective beam of which strikes on the beam splitter.…”
Section: Laser Beam Position Detectormentioning
confidence: 99%
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