In situ investigation of ion drift processes in glass during anodic bonding

Schmidt, Bernd; Nitzsche, P.; Lange, K.; Grigull, S.; Kreißig, U.; Thomas, B.; Herzog, K.

doi:10.1016/s0924-4247(97)01768-8

Cited by 40 publications

(23 citation statements)

References 12 publications

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“…Since that, it is only recently that in the "glass poling community," ideas related to the possibility of negative charge motions such as oxygen anions or electrons have been presented. 26,28,29 Notably, direct measurements indicating some oxygen depletion in the subsurface layer of glass after anodic bonding have been reported, 27,30 and studies of charge equilibrium in poled glasses performed from structural characterization by vibrational spectros-copies have also proposed an oxygen deficit in the poled region. 19,28,[31][32][33] The possibility of electronic conductivity within the space charge layer has been considered first by Krieger, 34 more recently for the poling of glass-metal nano-composites 35 or bismuth-rich glasses 36 and by Mariappan and Rolling in an impedance spectroscopy study of poled phospho-silicate glasses with a concentration of sodium and calcium oxide close to 50 mol%.…”

Section: Alkali-ion-rich Glassesmentioning

confidence: 99%

Thermal Poling of Optical Glasses: Mechanisms and Second‐Order Optical Properties

Dussauze

Cremoux

Adamietz

et al. 2012

Int J of Appl Glass Sci

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The objective to induce reproducible, efficient, and stable second‐order nonlinear optical properties (SONL) in an isotropic material remains a challenge in photonics. Thermal poling allows inducing SONL properties in glasses by the formation of an axial symmetry because of the implementation of a static electric field within the glassy matrix. A description of the main poling mechanisms is proposed. Depending on the glass compositions and the poling conditions, an effort is made to correlate poling mechanisms and the strength of the implemented static electric field. A review of the main technological improvements done to develop poled‐silica‐based electro‐optical modulators as well as the SONL efficiencies obtained for different glass compositions is reported and analyzed.

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Section: Alkali-ion-rich Glassesmentioning

confidence: 99%

Thermal Poling of Optical Glasses: Mechanisms and Second‐Order Optical Properties

Dussauze

Cremoux

Adamietz

et al. 2012

Int J of Appl Glass Sci

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“…Such reactions can also be accompanied by or compete with alteration of the silicate network structure . When the amount of reactive species entering the glass is not sufficient enough to compensate or consume all NBO sites left, emission of electrons and extinction of anions can take place . One such process could be the condensation of NBOs forming molecular O 2 and a new bridging oxygen (BO) .…”

Section: Introductionmentioning

confidence: 99%

Chemical structure and mechanical properties of soda lime silica glass surfaces treated by thermal poling in inert and reactive ambient gases

et al. 2018

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This study employed thermal poling at 200°C as a means to modify the surface mechanical properties of soda lime silica (SLS) glass. SLS float glass panels were allowed to react with molecules constituting ambient air (H2O, O2, N2) while sodium ions were depleted from the surface region through diffusion into the bulk under an anodic potential. A sample poled in inert gas (Ar) was used for comparison. Systematic analyses of the chemical composition, thickness, silicate network, trapped molecular species, and hydrous species in the sodium‐depleted layers revealed correlations between subsurface structural changes and mechanical properties such as hardness, elastic modulus, and fracture toughness. A silica‐like structure was created in the inert gas environment through restructuring of Si–O–Si bonds at 200°C in the Na‐depleted zone; this occurred far below Tg. This silica‐like surface also showed enhancement of hardness comparable to that of pure silica glass. The anodic thermal poling condition was found so reactive that O2 and N2 species can be incorporated into the glass, which also alters the glass structure and mechanical properties. In the case of the anodic surfaces prepared in a humid environment, the glass showed an improved resistance against crack formation, which implies that abundant hydrous species incorporated during thermal poling could be beneficial to improve the toughness.

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“…Bulk glass wafers with a thickness of several hundred micrometres do not only limit the miniaturization of the final devices -unless the glass is polished down in a costly process after being bonded to the first substrate -they also require higher external bond voltages to drive the alkali ion migration in the glass during the bond process [7].…”

Section: Hermetic Wafer-level-integration Of Shallow Cavities Using Amentioning

confidence: 99%

Wafer-level glass-caps for advanced optical applications

Leib¹,

Gyenge²,

Hansen³

et al. 2011

2011 IEEE 61st Electronic Components and Technology Conference (ECTC)

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A novel process flow to manufacture miniaturized optical windows on wafer-level is presented. Those windows can be used for miniaturized optical products like high-brightness LEDs (HB-LED) and digital projection (DLP) as well as more complex optical data-communication, since integrated optical functions can be implemented with low tolerances. We explain the fabrication of cap-wafers having a shallow cavity with a depth of typically 10m used in photo sensors and a unique manufacturing process for cap-wafers with a deep cavity of e.g. 300m used in LED packaging. Those cap-wafers are used in wafer-level integration of advanced, miniaturized optical products. We discuss two options for wafer bonding i.e. bonding using adhesive as well as anodic bonding. As an example on product level a miniaturized photo sensor package, a pressure sensor package as well as a LED package is discussed

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In situ investigation of ion drift processes in glass during anodic bonding

Cited by 40 publications

References 12 publications

Thermal Poling of Optical Glasses: Mechanisms and Second‐Order Optical Properties

Thermal Poling of Optical Glasses: Mechanisms and Second‐Order Optical Properties

Chemical structure and mechanical properties of soda lime silica glass surfaces treated by thermal poling in inert and reactive ambient gases

Wafer-level glass-caps for advanced optical applications

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