In Situ Characterization of Induced Stiction in a MEMS

Yu, Tao; Ranganathan, Ranjith; Johnson, Nathalie Weier; Yadav, Neha; Gale, Richard; Dallas, Tim

doi:10.1109/jmems.2007.893061

Cited by 14 publications

(3 citation statements)

References 27 publications

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“…Nevertheless, those structures can face several unwanted conditions while in use. They can stick to their lower electrodes or substrate due to several factors such as humidity due to large capillary forces [1][2][3][4][5][6][7][8][9][10][11], variation of its surrounding temperature, or some initial disturbances, such as mechanical shocks [12][13][14][15]. For example, humidity induces large capillary forces that a beam may undergo before it sticks to the substrate.…”

Section: Introductionmentioning

confidence: 99%

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

Ouakad

Younis

2013

Mathematical Problems in Engineering

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Modeling and analysis for the static behavior and collapse instabilities of a MEMS cantilever switch subjected to both electrical and thermal loadings are presented. The thermal loading forces can be as a result of a huge amount of switching contact of the microswitch. The model considers the microbeam as a continuous medium and the electric force as a nonlinear function of displacement and accounts for its fringing-field effect. The electric force is assumed to be distributed over specific lengths underneath the microbeam. A boundary-value solver is used to study the collapse instability, which brings the microbeam from its unstuck configuration to touch the substrate and gets stuck in the so-called pinned configuration. We have found negligible influence of the temperature on the static stability of the switch. We then investigate the effect of the thermal heating due to the current flow on the cantilever switch while it is in the on position (adhered position). We also found slight effect on the static stability of the switch.

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Section: Introductionmentioning

confidence: 99%

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

Ouakad

Younis

2013

Mathematical Problems in Engineering

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“…The role of monolayer coating as boundary lubricant in actual MEMS devices and the relevant physicochemical information on the buried interface remain scarce in the literature [8]. In the past, many tribological studies with SAMs are restricted to either single asperity contacts via atomic force microscopy (AFM) techniques [9][10][11][12][13], microtribometry-based friction measurements [14][15][16], or sliding contacts at device-level testing [17][18][19][20][21][22][23][24]. The current approach uniquely follows the endurance of monolayer coating in co-planar MEMS surfaces undergoing repeated impacts.…”

Section: Introductionmentioning

confidence: 99%

Morphological, Electrical, and Chemical Changes in Cyclically Contacting Polycrystalline Silicon Surfaces Coated with Perfluoroalkylsilane Self-Assembled Monolayer

et al. 2011

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The evolution of morphology, electrical properties, and chemical composition has been studied in cyclically contacting polycrystalline silicon (polysilicon) surfaces coated with perfluoroalkylsilane self-assembled monolayer (SAM). The microinstrument used is a MEMS cantilever that is repeatedly actuated out-of-plane to impact a landing pad and is then moved in-plane to enable nondestructive in situ inspection of the impacted area. Analyses show that a device with a monolayer coating exhibits signs of surface degradation after a much higher number of cycles than its uncoated counterpart. A sharp increase in contact resistance between the cantilever and landing pad is observed at *10 billion cycles for a coated device, versus *25 million cycles for an uncoated device. Likewise, the onset of grain fracture in the landing pad occurs at *25 billion cycles for the SAM-coated device, versus *3 billion cycles for its uncoated counterpart. The effectiveness of the monolayer coating diminishes after more than 100 billion contact cycles as the SAM layer is removed, and the polysilicon substrate becomes susceptible to adhesive wear.

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“…Bachmann et al [4] approach this problem in a different way, by performing pull-in tests on silicon suspended disc. Recently, different Authors ( [5], [6]) proposed añ direct measurement of adhesive forces through the difference between the pull-in and the pull-off voltages in electrostatically actuated structures of different shapes.…”

Section: Introductionmentioning

confidence: 99%

Finite Element modelling of adhesion phenomena in MEMS

Ardito

Corigliano

Frangi

2010

2010 11th International Thermal, Mechanical &Amp; Multi-Physics Simulation, and Experiments in Microelectronics and Microsystem

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In the last years many research works were focused on adhesion in micro-electro-mechanical systems (MEMS). In fact, that phenomenon can endanger the reliability of MEMS, both during the fabrication phase and in the operation conditions. The aim of the present study is to simulate the adhesion phenomena in different environmental conditions, by using Finite Element (FE) computational simulations on a representative part of the surface. A significant part of the work is devoted to the proper generation of FE model for artificial rough surfaces. The micro-scale analyses include the contact behavior of the asperities and the mechanical deformation of the bulk material, which is modeled as elastic-plastic. Some numerical results are presented and compared to previously published data.

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In Situ Characterization of Induced Stiction in a MEMS

Cited by 14 publications

References 27 publications

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

Morphological, Electrical, and Chemical Changes in Cyclically Contacting Polycrystalline Silicon Surfaces Coated with Perfluoroalkylsilane Self-Assembled Monolayer

Finite Element modelling of adhesion phenomena in MEMS

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