In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors

Zandi, Kazem; Wong, Brian J. F.; Zou, Jing; Kruzelecky, Roman V.; Jamroz, Wes; Peter, Yves-Alain

doi:10.1109/memsys.2010.5442337

Cited by 36 publications

(21 citation statements)

References 8 publications

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“…Fibers were bonded to the U-grooves using UV-curing optical adhesives. The whole setup is attached to an inclinable board that can be tilted [1]. Acceleration is applied to the device as a consequence of gravity by tilting the board (g sinθ).…”

Section: Characterizationmentioning

confidence: 99%

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VOA-based optical MEMS accelerometer

Zandi

Zou

Wong

et al. 2011

16th International Conference on Optical MEMS and Nanophotonics

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Section: Characterizationmentioning

confidence: 99%

“…A Silicon-On-insulator (SOI) optical accelerometer using a Fabry-Perot (FP) microcavity with two distributed Bragg reflectors (DBR) was recently reported by our group [1]. Optical accelerometers based on intensity modulation were proposed [2], [3], [4].…”

Section: Introductionmentioning

confidence: 99%

VOA-based optical MEMS accelerometer

Zandi

Zou

Wong

et al. 2011

16th International Conference on Optical MEMS and Nanophotonics

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“…The development of integrated strategies and the robustness of micromachined technologies, however, make possible applications of devices oriented on the micrometer scale, as presented in [16] where a MOEMS accelerometer based on silicon on insulator (SOI) technology has been proposed. A Fabry-Perot microcavity with two distributed Bragg reflectors (one attached to the proof mass) has been performed.…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

Trigona

Andò

Baglio

2014

IEEE Trans. Instrum. Meas.

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This paper reports the numerical and experimental investigation of a bulk and etch silicon on insulator optoelectromechanical system realized using a multilayer metal-dielectric photonic bandgap (PBG) structure. A specific optical structure is designed, which embeds an air gap; the acceleration to be measured induces displacements into a proof mass that in turn are transduced as variations in the optical reflectance spectrum of the PBG stack. The PBG optical stack is made of metals and dielectrics. Because of the large difference in the refractive indexes between these two classes of materials, the resulting optical properties of PBG transparent metals allow for obtaining a sharp change in the output signal even for very small changes of the air gap and therefore of the relative positions of the proof mass. The microelectromechanical system consists of a suspended square-shaped mass supported by four crab-leg beams; the central part is used as active optical area where the light beam is to be focused. The advantages of silicon micromachining combined with PBG properties have been addressed. The sensor proposed has been initially analytically modeled and numerically studied using CoventorWare. Then the device has been fabricated and an extensive experimental campaign has been performed.Index Terms-Bulk and etch silicon on insulator (BESOI) technology, micro-optoelectromechanical systems (MOEMS), photonic bandgap materials.

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“…Various types of transducer have been investigated, including optical fibre Bragg gratings 1, 2 , shutters/intensity modulators 3,4 and Fabry-Pérot interferometers (FPIs) 5 . MEMS-based FPI devices are particularly desirable because they are compatible with microfabrication 6,7 and have the potential for higher sensitivities than intensity-based devices.…”

Section: Introductionmentioning

confidence: 99%

Mechanically amplified MEMS optical accelerometer with FPI readout

2014

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We have developed a silicon MEMS optical accelerometer in which the motion of the proof mass is mechanically amplified using a V-beam mechanism prior to transduction. The output motion of the V-beam is detected using a FabryPérot interferometer (FPI) which is interrogated in reflection mode via a single-mode optical fibre. Mechanical amplification allows the sensitivity of the accelerometer to be increased without compromising the resonant frequency or measurement bandwidth. We have also devised an all-optical method for calibrating the return signal from the FPI, based on photothermal actuation of the V-beam structure using fibre-delivered light of a different wavelength. A finite-element model has been used to predict the relationship between the incident optical power and the cavity length at steady state, as well as the step response which determines the minimum time for calibration. Prototype devices have been fabricated with resonant frequencies above 10 kHz and approximately linear response for accelerations in the range 0.01 to 15 g.

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In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors

Cited by 36 publications

References 8 publications

VOA-based optical MEMS accelerometer

VOA-based optical MEMS accelerometer

Design, Fabrication, and Characterization of BESOI-Accelerometer Exploiting Photonic Bandgap Materials

Mechanically amplified MEMS optical accelerometer with FPI readout

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