VOA-based optical MEMS accelerometer

Zandi, Kazem; Zou, Jing; Wong, Brian J. F.; Kruzelecky, Roman V.; Peter, Yves-Alain

doi:10.1109/omems.2011.6031059

Cited by 6 publications

(2 citation statements)

References 5 publications

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“…Encoding of acceleration in intensity of the output optical signal is a simple and efficient mechanism for optical sensing suitable for harsh environmental conditions. In this technique, movement of proof-mass either modifies the coupling between light input and output paths [12][13][14] or blocks the optical path [15,16]. It is a process amenable to integration into PIC.…”

Section: Introductionmentioning

confidence: 99%

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Malayappan

Krishnaswamy²,

Pattnaik

2020

Photonics

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A novel lateral dual-axis a-Si/SiO2 waveguide Bragg grating based quad-beam accelerometer with high-resolution and large linear range has been presented in this paper. The sensor consists of silicon bulk micromachined proof mass suspended by silica beams. Three ridge gratings are positioned on the suspending beam and proof mass to maximize sensitivity and reduce noise. Impact of external acceleration in the sensing direction on the Bragg wavelength of gratings and MEMS structure has been modelled including the effects of strain, stress and temperature variation. Acceleration induces stress in the beam thus modifying the grating period and introducing chirp. The differential wavelength shift with respect to reference grating on the proof mass is the measure of acceleration. To compensate for the effect of the weight of the proof mass and increase the sensitivity of the sensor, electrostatic force of repulsion is applied to the proof mass. For the chosen parameters, the designed sensor has a linear response over a large range and a sensitivity of 30 pm/g. The temperature of surroundings, which acts as noise in sensor performance is compensated by taking differential wavelength shift with respect to reference grating. By design and choice of material, low cross-axis sensitivity is achieved. The proposed design enables a high-resolution well below 1 μ g/ Hz and is suitable for inertial navigation and seismometry applications.

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Section: Introductionmentioning

confidence: 99%

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Malayappan

Krishnaswamy²,

Pattnaik

2020

Photonics

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“…Mesoscale microelectromechanical structures, with features in the range between few hundreds of micrometers and up to several millimeters, are found on the upper scale of microelectromechanical systems (MEMS) [1][2][3][4][5][6][7] and are beneficial in applications where relatively bulky masses, large displacements, manufacturability, and ease of handling, packaging and integration are required. Among these applications are safe and arm devices [8][9][10], biomedical tools [11][12][13], optical communication systems [14], micro robots [15] and inertial sensors [5,16], just to name a few. Batch-fabricated and consequently lower cost mesoscale structures can potentially replace conventional mechanical devices produced by common for the macro-engineering but more expensive approaches such as machining and assembly of individual parts.…”

Section: Introductionmentioning

confidence: 99%

Mesoscale MEMS motion transformer and amplifier electrostatically actuated by parallel plate electrodes

Gerson¹,

Nachmias²,

Maimon³

et al. 2015

J. Micromech. Microeng.

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We report on the design, fabrication and characterization of a mesoscale microelectromechanical motion transformer and amplifier with integrated actuation. The device incorporates an electrostatic transducer with multiple parallel plate electrodes and an elastic suspension realized as a compliant mechanism, which converts small linear motion of the transducer into mechanically amplified angular motion of a rotating lever. By combining highly efficient small-gap actuation with the motion amplification the device is designed to provide a large, more than 60 µm, lever tip displacement along with a calculated blocking force increasing from the initial value of 0.8 mN up to 26 mN in the maximal stroke configuration when actuated at 150 V. The devices were fabricated from a silicon on insulator (SOI) wafer with (1 1 1) front surface orientation and a 150 µm thick device layer using deep reactive ion etching (DRIE) and their functionality was demonstrated experimentally. Good agreement between the results provided by finite elements analysis and the experimental data was observed. Our results demonstrate an ability to achieve both large displacements and high blocking forces in an electrostatically actuated mesoscale compliant mechanisms.

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Adaptive opto-electromechanical silicon-on-insulator increased bandwidth accelerometer

Hussein

2022

SN Appl. Sci.

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This paper studies the construction of a compact one-dimension-sensing iscreased bandwidth photonic accelerometer using cascaded groups of continued sections of a 50 ng seismic mass each attached to the silicon beams of two under etched slot waveguide electrostatic phase shift elements acting as voltage-controlled adaptive-precision springs. The accelerometer sensitivity is shown to be significantly increased by applying equal electrode voltages. Simulation results indicate that the sensitivity dynamic range is about 76 dB combining both open-loop and closed-loop voltage control of the sensor. The operation bandwidth of the accelerometer may be increased up to 250 kHz due to the cascaded multi-section architecture of the sensor. This advantage gives significant relief to the limitation in bandwidth response of single section counterparts. The sensor may be designed to detect impact accelerations up to 104 ms−2 and yet can still be electrostatically driven to detect sub-gravitational accelerations. The application of negative feedback voltage control to hold the seismic mass at close distances from a standstill is shown to significantly increase the acceleration detection range. The construction uses all in-plane components based on a silicon-on-insulator template with 300 nm of silicon core thickness. The proposed electromechanical suspension system and the electric feeding arrangements are the most simple. The accelerometer performance is theoretically deterministic. The study is based on performing numerical analysis for the electromechanical suspension system. The waveguides are simulated utilizing the VPIphotonics industry standard. Applications may include the automobile and aerospace industries, underwater sonar, industrial ultrasonic detection, seismology predictions, and medical ultrasonography. Article Highlights The cascading of compact high-speed accelerometer sections allows increasing the bandwidth response of the proposed sensor by many folds compared to its single-mass single-section counterparts. The suspension structure is electrostatically controlled by two voltages enabling widely controlling the sensitivity and detection range of the accelerometer. The proposed accelerometer may fit wide applications achieving high detection speeds and super sensitivities utilizing a small footprint and power-efficient structure.

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VOA-based optical MEMS accelerometer

Abstract: A novel in-plane double silicon-on-insulator optical MEMS accelerometer based on variable optical attenuator is presented. It is designed for micro-satellite navigation applications and it uses multimode waveguides integrated with MEMS providing a compact and reliable device.

Cited by 6 publications

References 5 publications

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Mesoscale MEMS motion transformer and amplifier electrostatically actuated by parallel plate electrodes

Adaptive opto-electromechanical silicon-on-insulator increased bandwidth accelerometer

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