In-line statistical process control and feedback for VLSI integrated circuit manufacturing

The sections in this article are Control in Breadth Generic Model of the Elements of a Controller Control in Depth Change Management Statistical Process Control Run‐to‐Run Model‐Based Process Control Equipment Signal Monitoring, Real‐Time Fault Detection and Classification Sensors In Situ Particle Monitors In‐Line Defect Monitoring and Contamination Control Wafer Position Tracking Data Mining and Data Warehousing Parametric and Yield Outlier Control Wafer Level Reliability Control Multivariate SPC, Especially for Equipment Signal Monitoring Acknowledgments

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Semiconductor Factory Control and Optimization

Butler

York

Bennett

et al. 1999

Wiley Encyclopedia of Electrical and Electronics Engineering

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Quantifying the value of ownership of yield analysis technologies

Weber¹,

Sankaran

Scher

et al.

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295)

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Abstract-A model based on information theory, which allows yield managers to determine optimal portfolio of yield analysis technologies for both the R&D and volume production environments, is presented. The information extraction per experimentation cycle and information extraction per unit time serve as benchmarking metrics for yield learning. They enable yield managers to make objective comparisons of apparently unrelated technologies. Combinations of four yield analysis tools-electrical testing, automatic defect classification, spatial signature analysis and wafer position analysis-are examined in detail to determine the relative value of ownership of different yield analysis technologies.

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Fault isolation during semiconductor manufacturing using automated discovery from wafer tracking databases

Saxena

Proceedings of 9th IEEE Conference on Artificial Intelligence for Applications

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In-line statistical process control and feedback for VLSI integrated circuit manufacturing

Cited by 8 publications

References 2 publications

Semiconductor Factory Control and Optimization

Semiconductor Factory Control and Optimization

Quantifying the value of ownership of yield analysis technologies

Fault isolation during semiconductor manufacturing using automated discovery from wafer tracking databases

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