2009
DOI: 10.1063/1.3193656
|View full text |Cite
|
Sign up to set email alerts
|

Improvement of resistive switching characteristics in TiO2 thin films with embedded Pt nanocrystals

Abstract: We have fabricated TiO2 thin films with embedded Pt nanocrystals (Pt-NCs) and investigated the resistive switching characteristics for nonvolatile memory application. Reversible and steady bistable resistance switching behavior was observed for the Pt/TiO2/Pt capacitors with Pt-NCs embedded in the TiO2 films. Moreover, an improvement in the stability of resistance switching and retention properties was also achieved from the embedding of uniform and fine Pt-NCs.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

2
33
1

Year Published

2010
2010
2019
2019

Publication Types

Select...
9
1

Relationship

0
10

Authors

Journals

citations
Cited by 137 publications
(36 citation statements)
references
References 16 publications
2
33
1
Order By: Relevance
“…However, resistive switching is unstable, which may cause operating issues [9,10]. Several methods such as doping [11], process optimization [12], interface control [13], and embedding nano-particles [14-16] have been adopted to improve the switching dispersion in various switching behaviors. All studies used inactive materials for their embedded nano-particles when examining their effect on switching behavior [14,17].…”
Section: Introductionmentioning
confidence: 99%
“…However, resistive switching is unstable, which may cause operating issues [9,10]. Several methods such as doping [11], process optimization [12], interface control [13], and embedding nano-particles [14-16] have been adopted to improve the switching dispersion in various switching behaviors. All studies used inactive materials for their embedded nano-particles when examining their effect on switching behavior [14,17].…”
Section: Introductionmentioning
confidence: 99%
“…To date, various methods including doping [9], interface engineering [10] and nanoparticle incorporation [11,12] were used to improve the performance of RRAM devices. The effects of Au and Pt nanoparticles embedded in ZrO 2 and TiO 2 oxide films have also been studied [12,13].…”
Section: Introductionmentioning
confidence: 99%
“…To solve this problem, many optimization methods were already proposed, such as the impurity doping, 11 process annealing, 18 active electrode, 19 and nanocrystal inducing. [20][21][22] By reducing the active energy of ion migration or localizing the driving electric field, the switching characteristics of these devices were significantly improved.…”
mentioning
confidence: 99%