Improvement of mechanical properties of Ti/TiN multilayer film deposited by sputtering

Mori, Teizaburo; Fukuda, Shin; Takemura, Yoshihiko

doi:10.1016/s0257-8972(01)01021-0

Cited by 51 publications

(18 citation statements)

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“…Kusano et al [7] showed that the hardness of compositionally modulated Ti/TiN multilayered films strongly dependent on modulation period and reached a maximum hardness of 29 GPa with a modulation period of 20 nm, which was much higher than the hardness of both single layered TiN and Ti. The Ti/TiN multilayer films can be deposited by pulsed laser deposition [8], rf magnetron sputtering [9], dc magnetron sputtering [10], hollow cathode ion plating [11], triode ion plating [12] and arc ion plating [13]. Ti/TiN multilayered coatings by a reactive magnetron sputtering have found to possess many virtues, e.g.…”

Section: Introductionmentioning

confidence: 99%

Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films

Subramanian

Ramadoss

Vidhya

et al. 2011

Materials Science and Engineering: B

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Section: Introductionmentioning

confidence: 99%

Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films

Subramanian

Ramadoss

Vidhya

et al. 2011

Materials Science and Engineering: B

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“…In addition to a hardness increase, other beneficial mechanical properties as, e.g., yield strength and bonding strength could be improved considerably in several metal/metal nitride multilayer films, e.g., in Ti/TiN multilayer films. [5] (ii) Multilayer films involving FeCo as the magnetic component were investigated by several research groups. It was frequently shown that important magnetic film properties as, e.g., the coercive field and resonance frequency depend on the FeCo film thickness.…”

mentioning

confidence: 99%

Multifunctional FeCo/TiN Multilayer Thin Films with Combined Magnetic and Protective Properties

Klever¹,

Stüber²,

Leiste³

et al. 2009

Adv Eng Mater

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Coatings with thicknesses ranging from a few nanometer up to several micrometer produced by physical vapor deposition (PVD) processes have been established in engineering technologies since the early 1980s. In particular, magnetron sputtered wear resistance coatings are industrially established and capable to enhance tool lifetimes significantly. However, in cases where optical inspection of a coating in use is not possible, an intrinsic sensor function of the film would be beneficial. Therefore, the development of wear resistant coatings with an integrated sensor functionality based on the insertion of a magnetoelastic ferromagnetic phase is suggested. In combination with appropriate read-out electronics such a film system would be ready for online monitoring of the coatings' actual state (e.g., strain, temperature, volume loss). This paper focuses on the development of wear resistance coatings which simultaneously supply beneficial mechanical properties as well as ferromagnetic properties optimized for online non-contact read-out applications. Multilayer coatings obtained through alternate stacking of magnetron sputtered TiN and FeCo layers with a nominal total thickness of 1000 nm were produced as a model system meeting the above conditions. The bilayer period was varied down to 2.6 nm while the individual layer thickness ratio t TiN /t FeCo was determined by the deposition rates and maintained constant at a value of about 3/1. The films were vacuum annealed ex situ in a static magnetic field subsequent to the deposition. The constitution of the as-deposited and annealed coatings as well as their mechanical (nanohardness, Young's modulus) and magnetic properties (magnetization hysteresis, frequency-dependent permeability) are described. Finally, the suitability of the coatings for the use in remote-interrogable wear sensor applications is briefly discussed.

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“…The hardness of interstitial phases is determined by the dominant orientations and properties of the atomic planes. 18 The results of x-ray analysis testify that the nitride phases have the predominating orientation in the formed nitride areas. Lines (111) and (200) of TiN prevail in the diffraction spectrum.…”

Section: Nitridingmentioning

confidence: 95%

“…The corrosion behavior in 0.9% sodium chloride (imitator of plasma of blood) of Ti-6Al-4V titanium alloy after the surface treatment in nitrogen is investigated. The forming of nitride fi lm decreases the corrosion rate of alloys [5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20] times depending on the parameters of nitriding. It is shown that stoichiometry and quality of nitride fi lm are determinative in the anticorrosion protection of the alloy's surface.…”

mentioning

confidence: 99%

Corrosion resistance of the Ti-6Al-4V titanium alloy with nitride coatings in 0.9 % NaCl

Pohrelyuk

Ткачук

Proskurnyak

2011

JOM

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How would you……describe the overall signifi cance of this paper? In this work the positive infl uence of pressure at nitriding on the corrosion resistance of Ti-6Al-4V titanium alloy in 0.9% NaCl regardless of the solution temperature is determined. It is shown that the infl uence of the temperature at nitriding is positive for the solution temperature of 36ºС and negative for 40ºС. The corrosion resistance of the alloy is determined by the composition of nitride fi lm and its physical and chemical characteristics.…describe this work to a materials science and engineering professional with no experience in your technical specialty? The corrosion behavior in 0.9% sodium chloride (imitator of plasma of blood) of Ti-6Al-4V titanium alloy after the surface treatment in nitrogen is investigated. The forming of nitride fi lm decreases the corrosion rate of alloys 5-20 times depending on the parameters of nitriding. It is shown that stoichiometry and quality of nitride fi lm are determinative in the anticorrosion protection of the alloy's surface.…describe this work to a layperson? Titanium alloys are used widely as cardiovascular implants. The use of titanium implants without additional treatment does not provide satisfactory corrosion resistance. Therefore the infl uence of chemicothermal treatment, namely nitriding, on the corrosion resistance of Ti-6Al-4V titanium alloy in 0.9% NaCl which models the environment of the human organism is investigated in this work. It is determined that nitriding infl uences positively the protection of the alloy's surface, improving the corrosion resistance regardless the temperature of biological solution.The infl uence of temperature and pressure of nitriding on the corrosion resistance of Ti-6Al-4V titanium alloy in 0.9% NaCl was studied. It is shown that forming of nitride fi lm improves the anticorrosion characteristics of the alloy regardless of the temperature of the corrosion environment. At the temperature of 36ºС the pressure and temperature of nitriding positively infl uence the anticorrosion characteristics of the alloy. At 40ºС the pressure positively infl uences the protection of the alloy surface, and the infl uence of the temperature factor is negative.

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Improvement of mechanical properties of Ti/TiN multilayer film deposited by sputtering

Cited by 51 publications

References 1 publication

Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films

Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films

Multifunctional FeCo/TiN Multilayer Thin Films with Combined Magnetic and Protective Properties

Corrosion resistance of the Ti-6Al-4V titanium alloy with nitride coatings in 0.9 % NaCl

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