Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition

Michihata, Masaki; Takaya, Yasuhiro; Hayashi, Terutake

doi:10.1299/jamdsm.6.764

Cited by 5 publications

(4 citation statements)

References 10 publications

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“…A probe stylus is commonly composed of a probe shaft and tip. Laser-trapping-based probes use a technique of optical tweezers to capture the probe tip [68,[125][126][127] (Figure 14). The probe tip is trapped in air using optical tweezers (Figure 14b).…”

Section: Laser-trapping-based Microprobe By Osaka Umentioning

confidence: 99%

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Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Laser-trapping-based Microprobe By Osaka Umentioning

confidence: 99%

“…Thus, laser-trapping-based probes are not suitable for deep hole measurements. The virtual shaft length is approximately 30 μm, and the aspect ratio is <4 [126]. The force to trap a probe tip is in the order of nanonewtons; therefore, the stiffness is as low as 0.15 mN/m, which is significantly small.…”

Section: Laser-trapping-based Microprobe By Osaka Umentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…However, it is extremely difficult to accurately measure microstructures such as micrometer-order small holes and grooves with a high aspect ratio. Various microstructure measurement system based on different principles have been proposed [4][5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

et al. 2023

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The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.

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“…However, it is difficult for optical microscopes to observe the sidewall, aperture inside and steep slope because the measuring resolution is confined by the aperture limit of the lens used. Probing systems based on laser trapping have been developed by Takaya et al [20][21][22][23]. A microsphere can be suspended in air by using a focused laser beam.…”

Section: Introductionmentioning

confidence: 99%

Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection

Ito

Kodama

Gao

2014

Meas. Sci. Technol.

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This paper introduces a newly developed probing system for a micro-coordinate measurement machine (micro-CMM) based on an interaction force generated by the water layer on the surface of the measuring object. In order to measure the dimensions of the micrometric structures, a probing system using a nanopipette ball stylus has been developed. A glass microsphere with diameter of 9 µm is used as a stylus tip of the probing system. The glass nanopipette, which is fabricated from a capillary glass tube by a thermal pulling process, is employed as a stylus shaft to improve the fixation strength of the stylus tip. The approach between the stylus tip and the surface of the measuring object can be detected by utilizing the method of shear-force detection. The stylus is oscillated in the lateral direction at its resonant frequency to detect an interaction force owing to the viscoelasticity of the meniscus layer existing on the surface of the measuring object. The oscillation amplitude is decreased by the shear-force applied to the stylus tip. In this study, the basic characteristics of the probing system including sensitivity, resolution and reproducibility are investigated. The experimental result of dimensional measurement of micrometer-scale structure is presented.

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Improvement of Laser Trapping Based Microprobe in Laser Shaded Condition

Cited by 5 publications

References 10 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection

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