Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection

Ito, So; Kodama, Issei; Gao, Wei

doi:10.1088/0957-0233/25/6/064011

Cited by 19 publications

(14 citation statements)

References 45 publications

(51 reference statements)

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“…The higher quality factor may contribute to the sensitivity of the device. Therefore, the material has been used to fabricate scanning probes for 2D measurement [24]. However, in the current study, the probe based on the quartz tuning fork is further used for 3D triggering.…”

Section: Probe Systemmentioning

confidence: 99%

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A Three-Dimensional Resonant Triggering Probe for Micro-CMM

Huang

Chen

et al. 2017

Applied Sciences

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To achieve true 3D nano-measurement with sub-nanometer resolution and very low touch force through a micro/nano coordinate measuring machine, a new 3D resonant trigger probe based on a quartz tuning fork is proposed. In this trigger probe, a quartz tuning fork with a microsphere tip vibrates at its resonant frequency, and is used as the sensing element. The resonance parameters of this quartz tuning fork (e.g., vibrating amplitude and resonant frequency) are extremely sensitive to external 3D microforces. The distinguished feature of this probe is its ability to interact with the sample surface in the actual three directions. The microsphere tip of the probe interacts with the sample surface in tapping mode in the Z direction, whereas it interacts in friction mode in the X and Y directions. The dynamic contact mechanism of the probe is based on interfacial force theory, and mechanical models of the interactions between the microsphere tip and sample surface in the X, Y, and Z directions are constructed and simulated. The experiment shows that the probe has sub-nanometer resolution in 3D directions and triggers repeatability of approximately 40 nm in each direction. Theoretical analysis and experimental results verify that this 3D resonant trigger probe can be used for true 3D profile measurement.

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Section: Probe Systemmentioning

confidence: 99%

“…However, the oscillation amplitude of the probe is approximately 5 µm, which may limit the usage of the probe. A shear-mode micro-probe proposed by Tohoku University is a vibrating type and is very sensitive, but it is asymmetric in the lateral direction [24,25].…”

Section: Introductionmentioning

confidence: 99%

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

Huang

Chen

et al. 2017

Applied Sciences

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“…In order to reduce the influence of the Abbe error, the optical axis of the laser interferometer is aligned with the center of the probe tip. The PZT stages are mounted on the DC servo motor driven positioning stages (M-111.1DG, PI) for coarse To determine the trigger point for the probing of the micro-probe to the measured surface, the interaction force of the water layer on the measured surface against the probe is detected through detecting the change of the probe vibration with the TC-QCR [26]. When the tip ball of the vibrating probe contacts with the water layer of the measured surface, the frequency of the probe vibration is shifted due to the adhesion force of the water layer.…”

Section: Experimental Setup For the Micro-cmmmentioning

confidence: 99%

“…To avoid the influence of the chamfered edges of the precision flat parts forming the micro-slit, it is necessary for the probe tip to be arranged inside of the micro-slit for measurement of the gap width. In the developed micro-CMM, the probing position along the Z-direction is determined by utilizing the measurement capability of the shear-mode micro-probe in both the X-and Z-directions [26]. Figure 13 shows the detection strategy and the detection results of the chamfered edges of the two precision flat plates, respectively.…”

Section: Experiments Of On-line Qualification and Gap Width Measurementmentioning

confidence: 99%

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A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

et al. 2016

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This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 µm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 µm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement.

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