1 Introduction GaN-based FETs are attracting considerable attention for high-voltage microwave power applications such as cellular phone base stations, wireless internet access system and intelligent transport system. This is due to its unique material properties, including a wide bandgap leading to high breakdown fields, a large high-field electron drift velocity leading to high speed, and the existence of polarization effects leading to high sheet charge density that exceeds 10 13 cm -2 . Several demonstrations concerning remarkable high-power operation over 100 W at 2 GHz [1-5] and over 3 W at 30 GHz [6,7] have been reported. In this paper, design and performance of high-frequency and high-voltage AlGaN/GaN heterojunction FETs are described. For high-power operation at L-band and C-band, a novel device design to suppress undesirable current collapse as well as to improve breakdown behavior and gain characteristics is presented. For Ka-band high-power operation, a short-channel device with the improved FET layout configuration is presented.