2013
DOI: 10.4236/jsemat.2013.33024
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Improved Photovoltaic Properties of Heterojunction Carbon Based Solar Cell

Abstract: Amorphous carbon (a-C) thin films have been synthesized by microwave (MW) surface wave plasma (SWP) chemical vapor deposition (CVD) on n-type silicon and quartz substrates, aiming at the application of the films for photovoltaic solar cells. Argon, acetylene and trimethylboron were used as a carrier, source and dopant gases. Analytical methods such as X-ray photoelectron spectroscopy (XPS), Hall Effect measurement, JASCO V-570 UV/VIS/NIR spectroscopy, Raman spectroscopy, Transmission electron microscopy (TEM) … Show more

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Cited by 8 publications
(8 citation statements)
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References 34 publications
(46 reference statements)
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“…Chemical vapor deposition (CVD) processes are widely used in the production of solar cells and include the deposition of crystalline silicon from chlorosilanes, iodides, bromides, and fluorides [ 265 ]. An undesirable side effect is the release of toxic SiO 2 .…”
Section: Fluoride Wastes Removal In Industrial Processesmentioning
confidence: 99%
“…Chemical vapor deposition (CVD) processes are widely used in the production of solar cells and include the deposition of crystalline silicon from chlorosilanes, iodides, bromides, and fluorides [ 265 ]. An undesirable side effect is the release of toxic SiO 2 .…”
Section: Fluoride Wastes Removal In Industrial Processesmentioning
confidence: 99%
“…The rectification ratio of 35.8 at ±0.5 V for the N-DLC=p-Si heterojunction is higher than those of the DLC=Si junctions reported previously. 1,36) The I-V characteristics of the heterojunction fabricated using the N-DLC film deposited at a N 2 flow ratio of 3.64% is shown in Figs. 9(b) and 9(c) in the Cartesian and semilog plots, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Carbon-based solar cells have been successfully made using SWCVD with an acetylene source and trimethyl boron as a doping source for a p-type layer. The samples were deposited on an n-type silicon substrate in two p-C/n-Si and p-C/i-C/n-Si configurations [23]. Using rf-PECVD, a solar cell with the p-PAC/i-a-Si:H/n-Si:H configurations has been successfully fabricated [24].…”
Section: Introductionmentioning
confidence: 99%
“…Amorphous carbon homojunction solar cells have not yet been developed by previous researchers. The main source of doping in the development of solar cells are gaseous doping sources [12,13,23,25,26], and liquid doping sources have never been used. The main source of carbon as active material is dominated by hydrocarbon compounds, and the use of carbon derived from agricultural products (biomass) has not been significantly developed.…”
Section: Introductionmentioning
confidence: 99%