Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Huang, Chien-Hsin; Lee, Chien-Hsing; Hsieh, Tar‐Hwa; Tsao, Li-Chi; Wu, Shao-Yi; Liou, Jhyy-Cheng; Wang, Mingyi; Chen, Li-Che; Yip, Ming‐Chuen; Fang, Weileun

doi:10.3390/s110606257

Cited by 35 publications

(14 citation statements)

References 10 publications

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“…Acoustic membranes, for example, are generally very thin (micron-scale) and must be mechanically robust with a high modulus to enable a highly sensitive frequency response and high vibrational amplitude. In the past few decades, tremendous efforts have been dedicated to developing various acoustic thin film materials based on plastic 7 , metal 8 , ceramic 9 , and carbon-based materials 10–12 for the purpose of enhancing the quality of the sound output. In particular, plastic thin films are used ubiquitously in commercial speakers as they are low cost and easy to process with controllable thickness and high modulus.…”

Section: Introductionmentioning

confidence: 99%

Single-digit-micrometer thickness wood speaker

et al. 2019

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Thin films of several microns in thickness are ubiquitously used in packaging, electronics, and acoustic sensors. Here we demonstrate that natural wood can be directly converted into an ultrathin film with a record-small thickness of less than 10 μm through partial delignification followed by densification. Benefiting from this aligned and laminated structure, the ultrathin wood film exhibits excellent mechanical properties with a high tensile strength of 342 MPa and a Young’s modulus of 43.6 GPa, respectively. The material’s ultrathin thickness and exceptional mechanical strength enable excellent acoustic properties with a 1.83-times higher resonance frequency and a 1.25-times greater displacement amplitude than a commercial polypropylene diaphragm found in an audio speaker. As a proof-of-concept, we directly use the ultrathin wood film as a diaphragm in a real speaker that can output music. The ultrathin wood film with excellent mechanical property and acoustic performance is a promising candidate for next-generation acoustic speakers.

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Section: Introductionmentioning

confidence: 99%

Single-digit-micrometer thickness wood speaker

et al. 2019

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“…Slot is defined as a long lines of emptied space, which achieved the same effects as perforated holes. In a follow up work from another group in Taiwan, Huang et al developed a circular corrugated Al diaphragm fabricated from the CMOS 0.35 µm process [100]. The latest work on an Al-based diaphragm is by Sedaghat et al [121], in which they attached a "frog arm" spring to it.…”

Section: Methodsmentioning

confidence: 99%

A Review of MEMS Capacitive Microphones

et al. 2020

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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“…CDs have been studied for quite a long time and were first widely used in capacitive pressure sensors and RF MEMS switches [41,42,[44][45][46][52][53][54][55][56]. Introducing the corrugated structure into the fiber-optic sensor can significantly improve the performance of sensors.…”

Section: The Application Of Cds In Miniature Fiber-optic Pressure Senmentioning

confidence: 99%

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Dai

Zheng

et al. 2019

Applied Sciences

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Corrugated diaphragms (CDs) have been widely used in many fields because of their higher pressure sensitivity and wider linear range compared to flat diaphragms (FDs) in the same circumstances. Especially in the application of miniature fiber-optic pressure sensors, the introduction of the corrugated structure gives the sensor high sensitivity, large dynamic range, good linearity, small hysteresis, good stability, and so on. Research on CD-based miniature fiber-optic pressure sensors has gradually attracted more attention in recent years. In this paper, the principles of operation of a miniature fiber-optic pressure sensor are briefly introduced, then the mechanical properties of FD and CD, as well as their influences on the performance of the sensor, are analyzed in detail. The application status of CDs in miniature fiber-optic pressure sensors is reviewed, and our conclusions and the prospects for the application of CDs in miniature fiber-optic pressure sensors are given finally.

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Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Cited by 35 publications

References 10 publications

Single-digit-micrometer thickness wood speaker

Single-digit-micrometer thickness wood speaker

A Review of MEMS Capacitive Microphones

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

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