2003
DOI: 10.1109/tadvp.2003.821084
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Impact of flip-chip packaging on copper/low-k structures

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Cited by 96 publications
(21 citation statements)
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“…Interfacial cracking is significantly affected by different factors, such as the adhesion property of the bi-material and the mismatch level between their modulus. Consequently, the crack propagates with a slight distance and extends parallel to the bonding interface [23]. The FEA simulation results based on the interfacial fracture mechanics and detailed analysis are presented in the succeeding section to validate the fracture behavior during the adhesion measurement of 4-PBT.…”
Section: Test Results Of Specimens With Psa/sin Filmsmentioning
confidence: 98%
“…Interfacial cracking is significantly affected by different factors, such as the adhesion property of the bi-material and the mismatch level between their modulus. Consequently, the crack propagates with a slight distance and extends parallel to the bonding interface [23]. The FEA simulation results based on the interfacial fracture mechanics and detailed analysis are presented in the succeeding section to validate the fracture behavior during the adhesion measurement of 4-PBT.…”
Section: Test Results Of Specimens With Psa/sin Filmsmentioning
confidence: 98%
“…Eventually, high-filler compounds with CTE values better matching to silicon gave sufficient results. For flip-chip packages, a solution was found in changing the metal layout in the IC layers [22,23]. For instance, the placement of active circuitry in the region beneath bondpads represents an effective method for not sacrificing either assembly or package reliability.…”
Section: Mouldmentioning
confidence: 99%
“…FE techniques are widely used to predict the deformations and stresses and their evolution during IC processes, packaging manufacturing processes, and/or product testing [4,5,8,[17][18][19][20][21][22][23][24][25][26]. Modelling techniques such as contact elements, global-local, sub-structuring, element birth and death, fracture mechanics and material models such as visco-elasticity, plasticity and creep are rapidly developed to predict the stress and strain state in the electronic Fig.…”
Section: Facing the Future: Cmos065 And Beyondmentioning
confidence: 99%
“…These are TSV etching and filling, wafer/die thinning, wafer bumping, high-temperature solder reflow, chip stacking, etc. 3,5 Hence, it is important to have a capability to accurately assess the stress generated during 3-D IC stacking.…”
Section: Introductionmentioning
confidence: 99%