2002
DOI: 10.1109/jstqe.2002.804232
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Immersion lens microscopy of photonic nanostructures and quantum dots

Abstract: Abstract-We describe recent experimental and theoretical advances in immersion lens microscopy for both surface and subsurface imaging as applied to photonic nanostructures. We examine in detail the ability of sharp metal tips to enhance local optical fields for nanometer resolution microscopy and spectroscopy. Finally, we describe a new approach to nano-optics, that of combining solid immersion microscopy with tip-enhanced focusing and show how such an approach may lead to 20-nm resolution with unity throughp… Show more

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Cited by 21 publications
(15 citation statements)
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References 51 publications
(66 reference statements)
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“…28,29 To investigate the spot size and the polarization properties, we propose also "zero-dimensional" nanostructures ͓e.g., InAs self-assembled quantum dots ͑SAD's͔ as an appealing tool. 30 These structures are much smaller than the wavelength of light and therefore allow for a high spatial resolution. To distinguish between longitudinal and transverse fields, the strong heavy and light hole splitting in SAD's ͑Refs.…”
Section: Discussionmentioning
confidence: 99%
“…28,29 To investigate the spot size and the polarization properties, we propose also "zero-dimensional" nanostructures ͓e.g., InAs self-assembled quantum dots ͑SAD's͔ as an appealing tool. 30 These structures are much smaller than the wavelength of light and therefore allow for a high spatial resolution. To distinguish between longitudinal and transverse fields, the strong heavy and light hole splitting in SAD's ͑Refs.…”
Section: Discussionmentioning
confidence: 99%
“…They can be used as apertureless optical nanoprobes for scanning near-field optical microscopy with high spatial resolution down to 15 nm at high electrical field intensities [15]. A tipenhanced SIL (TESIL) combines a SIL with a nano metal particle for local field enhancement [16].…”
Section: The Near-field Accessed With Solid Immersion Lens Technologymentioning
confidence: 99%
“…A SIL probe producing a spot size of about 100 nm transmits about half (50%) of the optical power [25,28,38]. By comparison, a metal-coated fiber-probe with a 100 nm aperture transmits only a tiny fraction (10 -3 -10 -6 ) of the light coupled into the fiber [16,[39][40][41]. The high S/N ratio is a prerequisite for performing near-field optical spectroscopy.…”
Section: The Near-field Accessed With Solid Immersion Lens Technologymentioning
confidence: 99%
“…SIL methods are well suited to the imaging, characterization and even the fabrication of many photonic nanostructure devices [14][15][16][17] since it is not possible to obtain any suitable immersion oils that have refractive indices approaching those of common semiconductors, nor is it possible to physically immerse the objective lens into solid samples.…”
Section: The Solid Immersion Lensmentioning
confidence: 99%