“…With just a few nanometers in optimal focus at a time, three dimensional information can be obtained by observing which features are in focus as the probe is focused to different depths. Such optical sectioning has previously been used with Z-contrast imaging in STEM to identify and determine the three dimensional positions of individual dopant atoms [2,3,4,5,6,7], and to image the core structure and inclination of dislocations [8,9,10]. However, Z-contrast imaging suffers from an inability to differentiate heavier elements of similar atomic number and very light elements can be obscured by the strong scattering of nearby heavy elements.…”