Imaging of surface acoustic waves on GaAs using 2D confocal Raman microscopy and atomic force microscopy

Rummel, Brian D.; Miroshnik, Leonid; Patriotis, M.; Li, Andrew; Sinno, Talid; Henry, Michael David; Balakrishnan, Ganesh; Han, Sang M.

doi:10.1063/5.0034572

Cited by 3 publications

(1 citation statement)

References 26 publications

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“…Appropriate L g keeps incident and reflected waves overlay on each other to form standing waves, that is Bragg reflection [17]. The center of the interdigital is set on the standing wave peak to enhance the electromechanical coupling efficiency [18]. Reflection coefficient has a great influence on the Q value [19], and it is positively correlated with N g .…”

Section: Resultsmentioning

confidence: 99%

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

et al. 2022

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The seeking of resonator with high Q and low insertion loss is attractive for critical sensing scenes based on the surface acoustic wave (SAW). In this work, 128° YX LiNbO3-based SAW resonators were utilized to optimize the output performance through IDT structure parameters. Once the pairs of IDTs, the acoustic aperture, the reflecting grid logarithm, and the gap between IDT and reflector are changed, a better resonance frequency of 224.85 MHz and a high Q of 1364.5 were obtained. All the results demonstrate the structure parameters design is helpful for the performance enhancement with regard to SAW resonators, especially for designing and fabricating high-Q devices.

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Section: Resultsmentioning

confidence: 99%

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

et al. 2022

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High-temperature characterization of interdigitated transducers on gallium arsenide and surface acoustic wave analysis via interdigitated transducer modeling

Rummel,

Miroshnik,

et al. 2023

Applied Physics Letters

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Interdigitated transducer devices may provide an advantageous platform to study stress-enhanced interfacial phenomena at elevated temperatures, and an appropriate device design requires a thorough understanding of temperature-dependent material properties. In this study, the scattering parameter response for a surface acoustic wave resonator is simulated using a frequency-domain finite element method from 20 to 177 °C. Experimental device measurements are taken for the interdigitated transducer device fabricated on semi-insulating GaAs 100 oriented in the 110 direction, and the results are in good agreement with the simulation. Surface acoustic wave analysis provides the magnitude of bulk stress values and surface displacement over the experimental temperature range produced by a standing surface acoustic wave. The computational analysis combined with experimental verification suggests that such devices, when optimized for the maximum magnitude, can produce strain levels that could influence chemical potential associated with crystalline growth, atomic diffusion, and catalytic reactions. The modeling results demonstrate an interdigitated transducer's potential as an experimental platform to study the impact of strain on temperature-sensitive surface and bulk phenomena in piezoelectric materials.

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Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

Rummel

Miroshnik

et al. 2022

Journal of Vacuum Science &Amp; Technology B

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Analysis of interdigitated transducers often relies on phenomenological models to approximate device electrical performance. While these approaches prove essential for signal processing applications, phenomenological models provide limited information on the device’s mechanical response and physical characteristics of the generated acoustic field. Finite element method modeling, in comparison, offers a robust platform to study the effects of the full device geometry on critical performance parameters of interdigitated transducer devices. In this study, we fabricate a surface acoustic wave resonator on semi-insulating GaAs [Formula: see text], which consists of an interdigitated transducer and acoustic mirror assembly. The device is subsequently modeled using fem software. A vector network analyzer is used to measure the experimental device scattering response, which compares well with the simulated results. The wave characteristics of the experimental device are measured by contact-mode atomic force microscopy, which validates the simulation’s mechanical response predictions. We further show that a computational parametric analysis can be used to optimize device designs for series resonance frequency, effective coupling coefficient, quality factor, and maximum acoustic surface displacement.

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Imaging of surface acoustic waves on GaAs using 2D confocal Raman microscopy and atomic force microscopy

Cited by 3 publications

References 26 publications

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

High-temperature characterization of interdigitated transducers on gallium arsenide and surface acoustic wave analysis via interdigitated transducer modeling

Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

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