Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

Geng, Wenping; Zhao, Caiqin; Xue, Feng; Qiao, Xiaojun; He, Jinlong; Xue, Gang; Liu, Yukai; Wei, Huifen; Bi, Kaixi; Mei, Linyu; Chou, Xiujian

doi:10.3390/nano12122109

Cited by 9 publications

(5 citation statements)

References 25 publications

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“…For device A, the −3 dB bandwidth was 0.0554 MHz, and the resonant frequency was 163.74 MHz; consequently, Q was 2955.60, 2.17-times higher than that reported by Geng et al in 2022 [24]. For device B, the −3 dB bandwidth was 0.0279 Mhz, and the resonant frequency was 160.625 MHz; consequently, Q was 5757.18, 1.95-times higher than SAW sensors with single electrode transducers and 4.23-times higher than that reported by Geng et al in 2022.…”

Section: Resultsmentioning

confidence: 60%

“…Simultaneously, from the S11 curves shows, device B has smaller insertion loss than device A, which is consistent with the conclusion that double electrode transducers exhibit lower insertion loss. [24] 224.85 1364.5 ZnO/6H-SiC [30] 688 1080 AlN/Al 2 O 3 [31] 688 The performance of SAW sensors in low temperatures was tested by the high-low temperature chamber. The tests were conducted from −100 to 150 • C using the S11 curves recorded for different temperature points by the network analyzer.…”

Section: Resultsmentioning

confidence: 99%

“…As a result, the performance of the SAW sensors was improved. The equivalent circuit model can be seen as an equivalent circuit when the SAW device is resonating, which converts crystal substrate and devices parameters to the RLC circuit [24]. The equation of equivalent circuit model is as follows.…”

Section: Temperature Sensor Simulationmentioning

confidence: 99%

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High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

et al. 2022

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Low temperature measurement is crucial in deep space exploration. Surface acoustic wave (SAW) sensors can measure temperature wirelessly, making them ideal in extreme situations when wired sensors are not applicable. In this study, 128° YX LiNbO3 was first introduced into low temperature measurements for its little creep or hysteresis in cryogenic environments and affordable price. The finite element method was utilized to raise the design efficiency and optimize the performance of SAW sensors by comparing the performance with different interdigital transducer (IDT) structure parameters, including the height of electrodes, pairs of IDTs, reflecting grid logarithm and acoustic aperture. Once the parameters were changed, a novel design of high-performance SAW temperature sensors based on 128° YX LiNbO3 with double electrode transducers was obtained, of which the Q value could reach up to 5757.18, 4.2-times higher than originally reported. Low temperature tests were conducted, and the frequency responsiveness of SAW sensors was almost linear from −100 °C to 150 °C, which is in good agreement with the simulation results. All results demonstrate that double electrode transducers are considerably efficient for performance enhancement, especially for high-Q SAW sensors, and indicate that LiNbO3 substrate can be a potential high-performance substitute for cryogenic temperature measurements.

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Section: Resultsmentioning

confidence: 60%

Section: Resultsmentioning

confidence: 99%

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High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

et al. 2022

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“…The S11 parameter is extracted and is shown in Figure 8. The S11 parameter is the rate of reflected and incident power based on the acoustoelectric and wave reflection properties of the SAW material [41].…”

Section: Frequency Analysismentioning

confidence: 99%

Surface Acoustic Wave (SAW) Sensors for Hip Implant: A Numerical and Computational Feasibility Investigation Using Finite Element Methods

et al. 2023

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In this paper, a surface acoustic wave (SAW) sensor for hip implant geometry was proposed for the application of total hip replacement. A two-port SAW device was numerically investigated for implementation with an operating frequency of 872 MHz that can be used in more common radio frequency interrogator units. A finite element analysis of the device was developed for a lithium niobate (LiNBO3) substrate with a Rayleigh velocity of 3488 m/s on COMSOL Multiphysics. The Multiphysics loading and frequency results highlighted a good uniformity with numerical results. Afterwards, a hip implant geometry was developed. The SAW sensor was mounted at two locations on the implant corresponding to two regions along the shaft of the femur bone. Three discrete conditions were studied for the feasibility of the implant with upper- and lower-body loading. The loading simulations highlighted that the stresses experienced do not exceed the yield strengths. The voltage output results indicated that the SAW sensor can be implanted in the hip implant for hip implant-loosening detection applications.

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“…For the longitudinal modes, increasing the number of electrode pairs to improve the device reflectivity can largely attenuate the longitudinal parasitic responses [17], with the drawback that it tends to cause excessive device size. Besides, Wu et al suppressed the longitudinal ripples deriving from the free boundary based on proper edge reflectors [18], which is more demanding on the device boundary conditions.…”

Section: Introductionmentioning

confidence: 99%

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

Zhang,

Wang,

Zhang

et al. 2023

Semicond. Sci. Technol.

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This work aims to solve the problem of tradeoff between various properties and spurious mode suppression in surface acoustic wave (SAW) resonators. A high-angle rotated Y-cut LiNbO3(LN)/SiO2/Si multilayered structure was proposed to balance the electromechanical coupling coefficient (K 2) and temperature coefficient of frequency (TCF), and the propagation characteristics of Rayleigh mode were simulated by the finite element method. For the widely existing spurious modes, the shear-horizontal wave and longitudinal modes were eliminated by optimizing the cut angle of LN and electrode thickness, and a method of double-layer electrode transverse modulation was proposed to suppress the transverse modes. This method reduces the mass loading effect by replacing the electrode from Cu to Cu/Al. Moreover, the Al thicknesses in different regions are changed to perform the transverse modulation, and thus a widespread suppression of transverse modes is achieved by exciting the piston mode and enhancing the energy constraint, with a significant improvement on quality factor at the resonance frequency. Eventually, the spurious-free SAW resonator has the K 2 of 9.5% and the TCF close to zero. This work provides a feasible scheme for the design of high performance SAW resonators with spurious mode suppression.

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Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO3 Single Crystal

Cited by 9 publications

References 25 publications

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3

Surface Acoustic Wave (SAW) Sensors for Hip Implant: A Numerical and Computational Feasibility Investigation Using Finite Element Methods

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

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