As a basis for biometric and chemical analysis, issues of how to dilute or concentrate substances such as particles or cells to specific concentrations have long been of interest to researchers. In this study, travelling surface acoustic wave (TSAW)-based devices with three frequencies (99.1, 48.8, 20.4 MHz) have been used to capture the suspended Polystyrene (PS) microspheres of various sizes (5, 20, 40 μm) in sessile droplets, which are controlled by acoustic field-induced fluid vortex (acoustic vortex) and aggregate into clusters or rings with particles. These phenomena can be explained by the interaction of three forces, which are drag force caused by ASF, ARF caused by Leaky-SAW and varying centrifugal force. Eventually, a novel approach of free transition between the particle ring and cluster was approached via modulating the acoustic amplitude of TSAW. By this method, multilayer particles agglomerate with 20 μm wrapped around 40 μm and 20 μm wrapped around 5 μm can be obtained, which provides the possibility to dilute or concentrate the particles to a specific concentration.
It is a great challenge to detect in-situ high-frequency vibration signals for extreme environment applications. A highly sensitive and robust vibration sensor is desired. Among the many piezoelectric materials, single-crystal lithium niobate (LiNbO3) could be a good candidate to meet the demand. In this work, a novel type of micro-electro-mechanical system (MEMS) vibration sensor based on a single crystalline LiNbO3 thin film is demonstrated. Firstly, the four-cantilever-beam MEMS vibration sensor was designed and optimized with the parametric method. The structural dependence on the intrinsic frequency and maximum stress was obtained. Then, the vibration sensor was fabricated using standard MEMS processes. The practical intrinsic frequency of the as-presented vibration sensor was 5.175 kHz, which was close to the calculated and simulated frequency. The dynamic performance of the vibration sensor was tested on a vibration platform after the packaging of the printed circuit board. The effect of acceleration was investigated, and it was observed that the output charge was proportional to the amplitude of the acceleration. As the loading acceleration amplitude is 10 g and the frequency is in the range of 20 to 2400 Hz, the output charge amplitude basically remains stable for the frequency range from 100 Hz to 1400 Hz, but there is a dramatic decrease around 1400 to 2200 Hz, and then it increases significantly. This should be attributed to the significant variation of the damping coefficient near 1800 Hz. Meanwhile, the effect of the temperature on the output was studied. The results show the nearly linear dependence of the output charge on the temperature. The presented MEMS vibration sensors were endowed with a high output performance, linear dependence and stable sensitivity, and could find potential applications for the detection of wide-band high-frequency vibration.
The seeking of resonator with high Q and low insertion loss is attractive for critical sensing scenes based on the surface acoustic wave (SAW). In this work, 128° YX LiNbO3-based SAW resonators were utilized to optimize the output performance through IDT structure parameters. Once the pairs of IDTs, the acoustic aperture, the reflecting grid logarithm, and the gap between IDT and reflector are changed, a better resonance frequency of 224.85 MHz and a high Q of 1364.5 were obtained. All the results demonstrate the structure parameters design is helpful for the performance enhancement with regard to SAW resonators, especially for designing and fabricating high-Q devices.
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