“…Several groups have found success with N doping, 10,11,13,14,16,[18][19][20][22][23][24][25]28,29 which is not surprising since the ionic radius of N is about that of O, so that N should be quite soluble as N O . On the other hand, there are only a few reports of p-type ZnO from P 21,27,30 or As 12,26 doping, and almost no reports involving any of the other possible dopants. In this letter, we discuss an evaporation/ sputtering method of creating As-doped, p-type ZnO.…”