Multifitting: software for the reflectometric reconstruction of multilayer nanofilms

Abstract

Multifitting is a computer program designed specifically for modeling the optical properties (reflection, transmission, absorption) of multilayer films consisting of an arbitrary number of layers in a wide range of wavelengths. Multifitting allows a user to calculate the reflectometric curves for a given structure (direct problem) and to find the parameters of the films from the experimentally obtained curves (inverse problem), either manually or automatically. Key features of Multifitting are the ability to work simultaneously with an arbitrary number of experimental curves and an ergonomic graphical user interface that is designed for intensive daily use in the diagnosis of thin films. Multifitting is positioned by the author as the successor to the IMD program, which has become the standard tool in research and technology groups synthesizing and studying thin-film coatings.

Intrinsic roughness and interfaces of Cr/Be multilayers

“…Another important factor that should not be forgotten when interpreting the results of numerical modelling is the applicability of the approximations used. To calculate scattering on rough interfaces in the Multifitting program (Svechnikov, 2020), we used the perturbative theory (Kozhevnikov & Pyatakhin, 2000). This involves the autocorrelation and cross-correlation PSD 2D of interfaces for calculation in a relatively simple manner, but its applicability is limited by the conditions…”

Periodic Multilayer for X-ray Spectroscopy in the Li K Range

“…Following deposition, the hard X-ray reflectivity of the sample was measured by means of a PANalytical X'PertPro four-crystal high-resolution diffractometer at the wavelength of 0.154 nm (Cu Kα radiation). The basic parameters of the structure, such as period, film thickness and interfacial roughness, were extracted from the fit of the experimental reflection curve, obtained in the θ-2θ mode, using the Multifitting software for reflectometric reconstruction of multilayer structures [23]. Figure 1 shows the experimental angular dependence of the reflection coefficient and the result of the fit.…”

Многослойные зеркала Ru/Sr для спектрального диапазона 9-12 nm

“…Анализ экспериментальных данных, полученных в рамках указанных измерений, а также их моделирование, проводимое с помощью программного обеспечения Multifitting [14], позволяют определить основные параметры структур: период, толщины слоев материалов, межслоевая шероховатость.…”