<i>L</i>- and <i>X</i>-Band Dual-Frequency Synthesizer Utilizing Lithium Niobate RF-MEMS and Open-Loop Frequency Dividers

Kourani, Ali; Yang, Yansong; Gong, Songbin

doi:10.1109/tuffc.2020.3048929

Cited by 5 publications

(7 citation statements)

References 32 publications

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“…Therefore, various devices, e.g. resonators [57], delay lines [112], and oscillators [90], have been demonstrated (figure 7) using higher-order Lamb modes.…”

Section: High-frequency Transductionmentioning

confidence: 99%

“…Such oscillators have smaller volumes and lower power consumptions, thanks to the compact acoustic resonator. The 1st example in figure 16 (a) here is an X-band oscillator using higherorder mode in thin-film LiNbO 3 [90]. The simultaneously low loss in acoustic and EM domains leads to high-Q resonators at GHz, enabling direct frequency synthesis.…”

Section: Conventional Acoustic Functionsmentioning

confidence: 99%

“…Thanks to the above low-loss, wideband, and highfrequency advantages of the platform, various thin-film LiNbO 3 based acoustic microsystems have been demonstrated in the last decade. The applications range from resonators and filters [69,75,76], transformers [77][78][79], rectifiers [80], delay lines [81][82][83][84][85][86][87], oscillators [88][89][90], ultrasound transducers [91,92], to emerging acoustoelectric amplifiers [93], non-reciprocal networks [94,95], acousto-optic modulators [96][97][98][99], and quantum systems [100]. These demonstrations include both conventional acoustic functions with improved performance and unprecedented acoustic signal processing functions, thanks to the high k 2 of thin-film LiNbO 3 .…”

Section: Introductionmentioning

confidence: 99%

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RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

Gong

2021

J. Micromech. Microeng.

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This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO3) based acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and great frequency scalability, thin-film LiNbO3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO3 based acoustic microsystems development.

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“…Therefore, various devices, e.g. resonators [57], delay lines [112], and oscillators [90], have been demonstrated (figure 7) using higher-order Lamb modes.…”

Section: High-frequency Transductionmentioning

confidence: 99%

Section: Conventional Acoustic Functionsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

Gong

2021

J. Micromech. Microeng.

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“…Among all the RF MEMS devices, on-chip vibrating micromechanical resonators have attracted a great deal of interest due to their high quality, small size and virtually zero power consumption. These great attributes, if associated with post-IC integration compatibility and a low motional resistance for impedance matching with circuits and modules at RF front ends, could position the vibrating MEMS lateral-extensional mode resonators as the best alternatives for the bulky off-chip quartz crystals and ceramic resonators [ 1 , 2 , 3 , 4 , 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

et al. 2023

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High motional resistance and incompatibility with post-CMOS fabrication due to thermal budget constraints are imperative issues associated with the back-end-of-line integration of lateral extensional vibrating micromechanical resonators. This paper presents piezoelectric ZnO-on-nickel resonators as a viable means for mitigating both of the issues. Lateral extensional mode resonators equipped with thin-film piezoelectric transducers can exhibit much lower motional impedances than their capacitive counterparts due to piezo-transducers’ higher electromechanical coupling coefficients. Meanwhile, the employment of electroplated nickel as the structural material allows the process temperature to be kept lower than 300 °C, which is low enough for the post-CMOS resonator fabrication. In this work, various geometrical rectangular and square plates resonators are investigated. Moreover, parallel combination of several resonators into a mechanically coupled array was explored as a systematic approach to lower motional resistance from ~1 kΩs to 0.562 kΩs. Higher order modes were investigated for achieving higher resonance frequencies up to 1.57 GHz. Local annealing by Joule heating was also exploited for quality factor improvement after device fabrication by ~2× enhancement and breaking the record of MEMS electroplated nickel resonators in lowering insertion loss to ~10 dB.

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“…The advantages of 5G stated above are achieved at the technical level by using specialized multiplexing protocols, using multi-element digital antenna arrays based on Massive MIMO technology, and millimetre waves. The latter feature completely depends on the parameters of the carrier frequency synthesizer [4,5]. Synthesizers should provide good noise and spectral characteristics.…”

Section: Introductionmentioning

confidence: 99%

Mathematical modelling and research of output spectrum of synthesizers based on high-speed DAC for 5G

Yakimenko,

Romashov,

Doktorov

et al. 2023

J. Phys.: Conf. Ser.

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The paper presents a mathematical model of the output signal of high-speed digital-to-analogue converters in special operating modes. This model simulates the output signal of a high-speed digital-to-analogue converters in time and frequency domain for the research of their frequency spectrum. The model consists of nonlinearities which cause undesirable frequency components (spurs) in the output spectrum. These are nonlinearities due to output signal sampling, phase code truncation and amplitude quantization errors. The paper describes PLL+DAC synthesizer which allows reducing the number and level of spurs in output spectrum.

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L- and X-Band Dual-Frequency Synthesizer Utilizing Lithium Niobate RF-MEMS and Open-Loop Frequency Dividers

Cited by 5 publications

References 32 publications

RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

Mathematical modelling and research of output spectrum of synthesizers based on high-speed DAC for 5G

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