Abstract:Articles you may be interested inInvestigation of multipolar electron cyclotron resonance plasma source sensors and models for plasma control Dry development of sub-0.25 μm features patterned with 193 nm silylation resistThe effect of plasma heating on wafer temperature during etching has been studied. Si and InP were etched using a high ion density discharge generated by an electron cyclotron resonance source. The wafer temperature was measured using fiber optic thermometry as microwave power, rf power, chamb… Show more
“…This has been observed experimentally as etch times under 3 min have produced devices with angled holes and non-volatile InCl x etch products. Note that the change in sample temperature as a function of time for a number of different process parameters has been investigated in detail by Thomas III, et al [11], and confirms that some minimum etch time (dependent upon the RF and ICP powers) is required for the sample to reach the requisite temperature (>150…”
In this paper we describe the technological and fabrication methods necessary to incorporate both photonic and electronic-band engineering in order to create novel surface-emitting quantum cascade microcavity laser sources. This technology offers the promise of several innovative applications such as the miniaturization of QC lasers, and multi-wavelength two-dimensional laser arrays for spectroscopy, gas-sensing and imaging. This approach is not limited to light-emitting devices, and may be efficiently applied to the development of mid-and far-infrared normal-incidence detectors.
“…This has been observed experimentally as etch times under 3 min have produced devices with angled holes and non-volatile InCl x etch products. Note that the change in sample temperature as a function of time for a number of different process parameters has been investigated in detail by Thomas III, et al [11], and confirms that some minimum etch time (dependent upon the RF and ICP powers) is required for the sample to reach the requisite temperature (>150…”
In this paper we describe the technological and fabrication methods necessary to incorporate both photonic and electronic-band engineering in order to create novel surface-emitting quantum cascade microcavity laser sources. This technology offers the promise of several innovative applications such as the miniaturization of QC lasers, and multi-wavelength two-dimensional laser arrays for spectroscopy, gas-sensing and imaging. This approach is not limited to light-emitting devices, and may be efficiently applied to the development of mid-and far-infrared normal-incidence detectors.
“…Meteor., 35, pp. 1963-1979, 1996, J. M. Leone, Jr., and D. L. Ermak, "A Real-Time Atmospheric Dispersion Modeling System," Eleventh Joint Conference on the Applications of Air Pollution Meteorology, Long Beach, California, January, 2000.…”
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