<i>Glow Discharge Processes: Sputtering and Plasma Etching</i>

Chapman, B. N.; Vossen, J. L.

doi:10.1063/1.2914660

Cited by 516 publications

(734 citation statements)

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“…The data also show that the onset of ionization occurs at a lower bias voltage in argon than in helium, consistent with the ionization potential ⑀ i of argon and helium gas ͑15.8 and 24.6 eV, respectively͒. 16 Figure 17 shows the I -V curves of an emissive probe at approximately the same wire temperature but at different pressures. These curves correspond to approximately the same temperature limited emissive current (I em ) with different ionization currents (⌬I i ).…”

Section: T E ϭE DV B D Ln͑i ͒ ͑1͒supporting

confidence: 48%

Use of emissive probes in high pressure plasma

Yan

Kamal

Amundson

et al. 1996

Review of Scientific Instruments

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The characteristics of emissive probes in unmagnetized high pressure ͑р1 Torr͒ argon and helium plasmas, produced by inductively coupled 13.56 MHz rf power, are studied. A procedure is given for interpreting emissive probe current-voltage ͑I -V͒ characteristics. The I -V curves indicate the amplitude of the rf fluctuation of the plasma potential. They also show ionization near the emissive probe when the potential drop between the emissive probe and the plasma potential is more than the ionization potential. Experiments show that when the temperature of the emissive probe wire and/or the neutral pressure is increased, ionization becomes significant. An increase in the local ion density due to the additional ionization was demonstrated by the I -V curves of an emissive probe and a nearby Langmuir probe. A simple procedure is presented for interpreting these results.

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Section: T E ϭE DV B D Ln͑i ͒ ͑1͒supporting

confidence: 48%

Use of emissive probes in high pressure plasma

Yan

Kamal

Amundson

et al. 1996

Review of Scientific Instruments

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“…In the case of high-pressure glow discharge, with a mean-free path of about 0.13 cm, the final acceleration of the nitrogen ions that impinge on the surface to be treated is reduced by inelastic collisions and, in the low-pressure cycle, with a mean-free path of about 65 cm, the higher effective acceleration of the nitrogen ions allows deeper penetration of the ions into the sample surface. 24,25 In this case, the plasma was produced by the secondary power supply running at 900 V and 80 mA, while a bias of Ϫ700 to Ϫ1000 V was applied to the sample holder. The current flowing through the sample holder was lower than 30 mA, in an area of about 100 cm 2 .…”

Section: Resultsmentioning

confidence: 99%

Alternated high- and low-pressure nitriding of austenitic stainless steel: Mechanisms and results

Gomes

Ueda

Reuther

2003

Journal of Applied Physics

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A combined surface modification treatment consisting of ion nitriding at high pressure and high temperature, followed by a cycle at low pressure, both cycles using a gas mixture of (N 2 /H 2 ):(50/50) in pressure, was applied to stainless-steel AISI 304. In the first cycle, in a glow discharge at 4ϫ10 Ϫ1 mbar and temperatures of 400-450°C, high-pressure nitriding was applied to the samples. In the second cycle, in a glow discharge at 8ϫ10 Ϫ4 mbar, low-pressure nitriding was applied to the samples. Applying this sequential hybrid treatment alternately, good nitriding was obtained. X-ray diffraction ͑XRD͒ measurements showed the effects of this hybrid ion nitriding in the AISI 304 surface, indicating thick nitrided layers, confirmed by Auger electron spectroscopy ͑AES͒. Conversion electron Mössbauer spectroscopy, combined with AES and XRD, showed phases and compounds induced by such treatments. Vickers hardness measurements showed great enhancement in the surface hardness. Applying other combinations of gas mixtures and cycles, produced diverse results in the surface, like the induction of ␣-and ⑀-phases.

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“…Any low temperature plasma is a non-equilibrium system, which means that the electron temperature differs significantly from the temperature of the ions and the neutral particles. Normally the temperature of the electrons is up to 100 times higher than the temperatures of ions and neutrals [20]. Of main interest for plasma -solid reactions is the thermodynamic temperature of a sample immersed into the plasma.…”

Section: Temperature Profilementioning

confidence: 99%

“…without applying an external voltage to the surface. According to Chapman [20] the plasma potential V P is given as…”

Section: Particle Bombardment/ion Implantationmentioning

confidence: 99%

Surface oxygen exchange between yttria-stabilised zirconia and a low-temperature oxygen rf-plasma

et al. 2004

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Isotope Exchange/Depth Profiling (IEDP) using Secondary Ion Mass Spectrometry (SIMS) has been used to determine the oxygen tracer diffusion and surface exchange coefficients of (100) oriented 9.5 mol% yttria stabilised zirconia single crystals. Exchange experiments performed with molecular oxygen are compared with the exchange using an oxygen plasma. The surface exchange coefficient for specimens in a plasma is up to 100 times higher compared to measurements with normal molecular oxygen. For the exchange experiments we used an inductively coupled radio frequency (rf) oxygen plasma with a maximum radio frequency power of 250 W. Double probe measurements and optical emission spectrometry are used for the characterisation of the plasma. The measured electron temperatures are within the range of 5 -12 eV. D

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Glow Discharge Processes: Sputtering and Plasma Etching

Cited by 516 publications

References 0 publications

Use of emissive probes in high pressure plasma

Use of emissive probes in high pressure plasma

Alternated high- and low-pressure nitriding of austenitic stainless steel: Mechanisms and results

Surface oxygen exchange between yttria-stabilised zirconia and a low-temperature oxygen rf-plasma

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