Hydrogenated Silicon Carbonitride Thin Film Nanostructuring Using SF6 Plasma: Structural and Optical Analysis

Saloum, S.; Shaker, S. A.; Alkafri, M. N.; Obaid, A.; Hussin, R.

doi:10.1007/s12633-020-00392-7

Cited by 6 publications

(4 citation statements)

References 49 publications

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“…This process causes a unique film deposition onto the substrate surface within the plasma reactor, known as plasma polymerization. Moreover, this technique is efficient, requiring only minimal amounts of precursor materials and consuming minimal energy (Saloum et al, 2019a;Saloum et al, 2019bSaloum et al, 2020aSaloum et al, 2020b).…”

Section: Introductionmentioning

confidence: 99%

“…Typically, when the PECVD technique is applied to these organosilicon compounds, it yields a transparent film with a chemical structure of SiO xCyHz or SiNxCyHz (Jaritz et al, 2021;Rosace et al, 2010). Although HMDSO polymeric films have been utilized in the treatment of various fabrics (Ibrahim & Eid, 2020;Prado et al, 2022;Rosace et al, 2010;Zouari et al, 2021), HMDSN has yet to be used in fabric finishing, while it was used in other fields, where silicon organic thin films were prepared from HMDSN with different feed gases (Nitrogen and Argon), and the formed thin films had a good wettability and promising characteristics for sensing humidity of air and sensing ammonia gas (Saloum et al, 2020a).…”

Section: Introductionmentioning

confidence: 99%

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Cotton fabric surface treatment by plasma-deposited hexamethyldisilazane thin films

Alali,

Saffour,

Saloum

2024

JART

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In the realm of fabric finishing, achieving the best wettability in cotton fabric is often a desired outcome. To accomplish this, a plasma-enhanced chemical vapor deposition (PECVD) system was used to deposit Hexamethyldisilazane (HMDSN) thin films onto cotton fabric for two different durations: 15 and 30 minutes. Various fabric properties were evaluated to determine the effectiveness of the treatment, including wettability, surface morphology, chemical structure, the effect of deposition on fabric stiffness, and the film fastness on the abrasion and washing. These properties were assessed using SEM, FTIR, and Martindale tester. Results indicated that both treatment durations improved the fabric's wicking ability. However, the film did not have a good fastness on abrasion and washing.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Cotton fabric surface treatment by plasma-deposited hexamethyldisilazane thin films

Alali,

Saffour,

Saloum

2024

JART

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“…Interest in silicon carbonitride thin films and coatings has accelerated over the last forty years due to their important chemical, electrical, optical and mechanical properties and their potential to enable new devices [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

et al. 2023

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We report an investigation into 1,4-Bis-N,N-(trimethylsilyl)piperazine (BTMSP) as a novel precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD). The thermal stability, temperature dependence of vapor pressure and thermodynamic constants of the evaporation process of BTMSP were determined by static tensimetry with a glass membrane zero manometer. The transformation of the compound in low-power (25 W) plasma conditions was investigated by optical emission spectroscopy. It was shown that BTMSP undergoes destruction, accompanied by H and CH elimination and CN formation. SiCN(H) films were deposited in a hot-wall plasma-enhanced CVD reactor. The optical properties of the films were studied by spectral ellipsometry (refractive index: 1.5–2.2; absorption coefficient: 0–0.12) and UV–Vis spectroscopy (transmittance: up to 95%; optical bandgap: 1.6–4.9 eV). Information on the aging behavior of the films is also provided. The transformation of the films occurred through water adsorption and the formation of Si–O bonds with the degradation of Si–H, N–H and Si–CHx–Si bonds.

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“…Plasma treatment is a powerful way to achieve hydrophilic or hydrophobic properties for polymer surfaces. The plasma atmospheres [ 15 ] to achieve hydrophilic property include O 2 [ 16 , 17 , 18 ], N 2 [ 19 ], Cl 2 [ 20 ], Ar [ 21 , 22 ], Ar/O 2 [ 23 ], Ar/N 2 [ 23 ], and O 2 /H 2 [ 24 ], while the atmospheres for hydrophobic treatment include CF 4 [ 25 ], SF 6 [ 26 ], and Ar/SF 6 [ 23 ]. Among these atmospheres, oxygen plasma is more frequently used to form hydrophilic polymer surfaces to achieve increased wettability [ 27 ] and enhanced adhesion [ 28 ] used in microfluidic devices [ 1 , 15 ], biological fields [ 29 ], and so on.…”

Section: Introductionmentioning

confidence: 99%

Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

Dou

Zhou

2021

Sensors

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Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics. In this work, the surface wettability tuning of acrylic resin photoresist by oxygen plasma or ultra-violet/ozone, and its aging performance in different atmospheres, were systematically studied. The chemical and physical characterizations of the surfaces before and after modification show a dramatic decrease in the C–C group and increase in surface roughness for oxygen plasma treatment, while a decrease of the C–C group was found for the UV/ozone treatment. The above difference in the surface tuning mechanism may explain the stronger hydrophilic modification effect of oxygen plasma. In addition, we found an obvious fading of the wettability tuning effect with an environment-related aging speed, which can also be featured by the decrease of the C–C group. This study demonstrates the dominated chemical and physical changes during surface wettability tuning and its aging process, and provides basis for surface tuning and the applications in microfluidics.

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Hydrogenated Silicon Carbonitride Thin Film Nanostructuring Using SF6 Plasma: Structural and Optical Analysis

Cited by 6 publications

References 49 publications

Cotton fabric surface treatment by plasma-deposited hexamethyldisilazane thin films

Cotton fabric surface treatment by plasma-deposited hexamethyldisilazane thin films

1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor

Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

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