2006 IEEE International Reliability Physics Symposium Proceedings 2006
DOI: 10.1109/relphy.2006.251284
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Hot-Carrier Photoemission in Scaled CMOS Technologies: A Challenge for Emission Based Testing and Diagnostics

Abstract: Optical testing of advanced CMOS circuits successfully exploits the near-infrared photon emission by hot-carriers in transistor channels (see EMMI [1] and PICA [2][3] techniques). However, due to the continuous scaling of features size and supply voltage, spontaneous emission is becoming fainter and optical circuit diagnostics becomes more challenging.Here we present the experimental characterization of hot-carrier luminescence emitted by transistors in four CMOS technologies from two different manufacturers.… Show more

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Cited by 22 publications
(10 citation statements)
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“…However, the actual emission probability is complex to calculate as many factors contribute [134]. Scaling, for example, has some positive effects on the emission probability [169], which makes it possible to observe hot-carrier luminescence even in recent technologies.…”
Section: Photonic Emission In Cmosmentioning
confidence: 99%
See 1 more Smart Citation
“…However, the actual emission probability is complex to calculate as many factors contribute [134]. Scaling, for example, has some positive effects on the emission probability [169], which makes it possible to observe hot-carrier luminescence even in recent technologies.…”
Section: Photonic Emission In Cmosmentioning
confidence: 99%
“…eliminate optical emission [161,169,171]. Moreover, photonic detection techniques continue to improve rapidly.…”
Section: Simple Photonic Emission Analysis 57/136mentioning
confidence: 99%
“…TRE emission intensity decreases nonlinearly with supply voltage (Rowlette and Eiles, 2003). The resulting SNR challenge of recent IC technologies may not be overly severe as recent studies indicate (Tosi et al, 2006). Spectral information of the emission has so far only marginally been used in analysis.…”
Section: Time Resolved Photon Emission (Tre)mentioning
confidence: 99%
“…Exponentially decreasing PE intensity with supply voltage has for a long time been regarded as main risk for the future application of this technique. But, recent studies at low voltage technology devices [9] indicate that the resulting SNR challenge may not be overly severe. The main challenges of PE and TRE are: -The internal delay per inverter will go below the TRE time resolution in the coming years which makes it more complicted to associate a definite device to a switching event.…”
Section: Photon Emissionmentioning
confidence: 99%