Homodyne full-field interferometer for measuring dynamic surface phenomena in microstructures

Synchronous measurement of surface deformation and gradient distribution in microstructures

“…10 Some commonly used optical measurement technologies are holographic interferometry 11 and digital speckle pattern interferometry. 12 Digital speckle pattern interferometry is often applied for displacement measurement, strain analysis, dynamic testing, and nondestructive flaw detection of materials and structures in aerospace, automobile, ship manufacturing, and relevant other fields because it can cover a full-field, involves real-time measurement, capable of online detection, and has high sensitivity and high precision. 13 In recent years, with the development and improvement of this technology, the combination of speckle pattern interference system and microscopic imaging system has attracted attention for measurement of microstructure.…”

“…This method is very suitable for measurement of microstructure 10 . Some commonly used optical measurement technologies are holographic interferometry 11 and digital speckle pattern interferometry 12 . Digital speckle pattern interferometry is often applied for displacement measurement, strain analysis, dynamic testing, and nondestructive flaw detection of materials and structures in aerospace, automobile, ship manufacturing, and relevant other fields because it can cover a full-field, involves real-time measurement, capable of online detection, and has high sensitivity and high precision 13 .…”

Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

“…Optical interferometry has the advantages of non-contact, high accuracy, and direct measurement of micro-vibration, so they have been widely used. Common optical interferometry includes homodyne interferometry [1][2][3][4][5][6], heterodyne interferometry [7][8][9][10][11][12], Sagnac interferometry [13] and stroboscopic white light interferometry [14][15][16][17]. Knuuttila, J. V. et al [3] demonstrated a homodyne scanning Michelson interferometer, which can directly measure the surface acoustic wave in the range of 0.5 MHz to 1 GHz.…”

A versatile heterodyne interferometer for vibration measurement and analysis of micro-structures

“…© 2020 The Japan Society of Applied Physics Supplementary material for this article is available online O ptical interferometry techniques have been widely studied due to direct, non-contact measurements of out-of-plane vibration fields which provide information for the design and performance of micro-structures. [1][2][3][4][5][6][7][8][9][10][11] Among these techniques, full field interferometers [12][13][14][15][16][17][18] are faster than scanning laser interferometers [19][20][21][22][23][24][25][26][27][28][29] in obtaining the whole vibration image. The frequency range and the amplitude range of these two types of interferometers are different.…”