Highly selective and widely tunable 1.55-μm InP/air-gap micromachined Fabry-Perot filter for optical communications

Spisser, A.; Ledantec, R.; Seassal, Christian; Leclercq, Jean Louis; Benyattou, T.; Rondi, D.; Blondeau, R.; Guillot, G.; Viktorovitch, P.

doi:10.1109/68.705609

Cited by 100 publications

(46 citation statements)

References 9 publications

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“…Early work in AlGaAs [98], [99] has led to the rapid development of this field with several important contributors [100]- [102], and it has also led to the creation of MEMS tunable vertical cavity surface emitting semiconductor lasers (VCSELs) (for an in-depth description of MEMS tunable VCSELs, see [103]). This type of fabrication process results in excellent mirrors, but the process is not compatible with silicon technology.…”

Section: E Spectral Intensity Filtersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: E Spectral Intensity Filtersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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“…In comparison, an InP/air-gap DBR can easily provide very wide high-reflectivity band with much fewer pairs, due to very large refractive-index contrast between the InP and the air gap. Thus, the thickness tolerance of the epitaxy layer is remarkably improved [6,7]. However, to our knowledge, no research work has been reported on RCE photodetectors based on InP/air-gap DBRs.…”

Section: Introductionmentioning

confidence: 95%

1.57‐μm InP‐based resonant‐cavity‐enhanced photodetector with InP/air‐gap Bragg reflectors

Ren¹,

Huang²,

Chong³

et al. 2004

Micro & Optical Tech Letters

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We can thus affirm that we have observed the resonant influence of the small S-shaped metal particles on the guided mode. This result opens many doors, as these artificial materials are easy to fabricate and offer a wide range of electromagnetic types of operation.Further experimental and theoretical studies will show the explicit effects of resonant permitivity of the grid in coplanar lines. 1.57-m InP-BASED RESONANT-CAVITY-ENHANCED PHOTODETECTOR WITH InP/AIR-GAP BRAGG REFLECTORS

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“…Research on highly efficient and compact tunable Fabry-Pérot filter devices ( Fig. 1) has been reported by using this technology approach [2][3][4]. Polarization selectivity can be added to these spectral membrane filters by introducing a periodic structure.…”

Section: Introductionmentioning

confidence: 98%