High-Velocity Carbon Plume Generated by Nd:YAG Laser for Thin Carbon Film Deposition

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

“…3 also shows that for normal-plane samples, the laser fluence also contributes to the sp 3 content. The effects of laser wavelength and fluence on the sp 3 content are in agreement with other reports [2,3,13]. It is noted that these two laser parameters are closely related to the production of ionized carbon species with sufficient kinetic energy that enables the subplantation formation [12] of DLC.…”

“…The formation of the normal-plane DLC by PLD is largely explained by the subplantation process because of the forwarddirected, high kinetic energy, and ionized carbon species produced [12,13]. However, when the graphite target was irradiated by UV laser pulses, DLC was found in the top layer of highly oriented pyrolytic graphite (HOPG), which contained as much as 50% sp 3 of the hybrid-states carbon [14,15].…”