Parametric studies of diamond-like carbon by pulsed Nd:YAG laser deposition

Yap, Seong Shan; Siew, Wee Ong; Nee, Chen Hon; Tou, Teck Yong

doi:10.1016/j.diamond.2011.01.013

Cited by 17 publications

(11 citation statements)

References 37 publications

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“…Based on the results of the RS decomposition the quality of the DLC-coating was evaluated with DLC coefficient calculation, determined by the integral ratio of the intensities D-and G-lines [17].…”

Section: Resultsmentioning

confidence: 99%

Physical chemical and Protective Properties of the Diamond-Like Carbon Coatings Synthesized from Separated Plasma of Electric Arc

2015

2015 the 5th International Workshop on Computer Science and Engineering-Information Processing and Control Engineering

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Research of the protective diamond-like carbon coatings by means of IR-spectral ellipsometry method and Raman spectroscopy method were carried out. Diamond-like carbon coefficients, optical constants, specific electric resistances and thicknesses of diamond-like carbon coatings were determined. Research of the mass loss of the samples at the thermovacuum impact also were performed. It is shown, diamond-like carbon coatings have well protective (barrier) properties hindering polymer material degradation in the outer space environment.

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Section: Resultsmentioning

confidence: 99%

Physical chemical and Protective Properties of the Diamond-Like Carbon Coatings Synthesized from Separated Plasma of Electric Arc

2015

2015 the 5th International Workshop on Computer Science and Engineering-Information Processing and Control Engineering

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“…DLC films were synthesized on single-crystal silicon (100) and quartz glass substrate using RFmagnetron sputtering (RF-MS) [6], pulse laser ablation (PLA) [7,8], ion beam deposition (IBD) [10] and pulsed cathode vacuum arc evaporation (CVAE) [12]. Graphite targets (99.5 % purity) with different size were used as source materials in the deposition process of four techniques.…”

Section: Methodsmentioning

confidence: 99%

“…From then on, more and more deposition techniques and methods have been created to improve the comprehensive properties of the DLC films during the past fourty years. Currently, the DLC films are mainly fabricated by the following methods, such as magnetron sputtering (MS) [5,6], pulsed laser ablation (PLA) [7,8], ion beam deposition (IBD) [9,10], and cathode vacuum arc evaporation (CVAE) [11,12]. And the composition, structure and performance are varied with different deposition methods.…”

Section: Introductionmentioning

confidence: 99%

Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

Wang¹,

Bin²,

Liu³

et al. 2017

Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)

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Abstract. Diamond-like carbon (DLC) films were prepared on silicon substrate using four different vacuum plasma methods: magnetron sputtering (MS), pulse laser ablation (PLA), ion beam deposition (IBD) and pulse cathode vacuum arc evaporation (CVAE). The microstructure, surface morphology and optical properties of the DLC films were investigated by Raman spectroscopy, atomic force microscope (AFM) and UV-visible spectrophotometer. The results showed that the films prepared by different vacuum plasma methods varied in the microstructure. The film prepared by CVAE possessed the smallest grain size of graphite with the highest disordering of Csp2 clusters, while more disordered Csp2 clusters presented in the DLC film due to the high ions energy density during PLA. Meanwhile, the deposition methods mainly affected the size of particles and roughness of the DLC films under the same thickness. The film by PLA shows a quite smooth surface structure with uniform particle size. In terms of the optical properties, the films prepared by magnetron sputtering expressed the best optical performance among the four vacuum plasma methods.

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“…Numerous deposition techniques have been tested for deposition of DLC layers, the most studied being chemical vapor deposition [8,9,10], pulsed laser deposition (PLD) [11,12,13] and magnetron sputtering [14]. Targets used as raw materials for bombardment or irradiation are usually made of graphite.…”

Section: Introductionmentioning

confidence: 99%

The Role of Ambient Gas and Pressure on the Structuring of Hard Diamond-Like Carbon Films Synthesized by Pulsed Laser Deposition

et al. 2015

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Hard carbon thin films were synthesized on Si (100) and quartz substrates by the Pulsed Laser Deposition (PLD) technique in vacuum or methane ambient to study their suitability for applications requiring high mechanical resistance. The deposited films’ surface morphology was investigated by scanning electron microscopy, crystalline status by X-ray diffraction, packing and density by X-ray reflectivity, chemical bonding by Raman and X-ray photoelectron spectroscopy, adherence by “pull-out” measurements and mechanical properties by nanoindentation tests. Films synthesized in vacuum were a-C DLC type, while films synthesized in methane were categorized as a-C:H. The majority of PLD films consisted of two layers: one low density layer towards the surface and a higher density layer in contact with the substrate. The deposition gas pressure played a crucial role on films thickness, component layers thickness ratio, structure and mechanical properties. The films were smooth, amorphous and composed of a mixture of sp3-sp2 carbon, with sp3 content ranging between 50% and 90%. The thickness and density of the two constituent layers of a film directly determined its mechanical properties.

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Parametric studies of diamond-like carbon by pulsed Nd:YAG laser deposition

Cited by 17 publications

References 37 publications

Physical chemical and Protective Properties of the Diamond-Like Carbon Coatings Synthesized from Separated Plasma of Electric Arc

Physical chemical and Protective Properties of the Diamond-Like Carbon Coatings Synthesized from Separated Plasma of Electric Arc

Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

The Role of Ambient Gas and Pressure on the Structuring of Hard Diamond-Like Carbon Films Synthesized by Pulsed Laser Deposition

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