High Temperature Gradient Pirani Micro-Sensor Designed and Tested for Aerodynamic Wall Pressure Measurement

Ghouila-Houri, Cécile; Talbi, Abdelkrim; Viard, R.; Arnoult, T.; Kazar-Mendes, M.; Mazzamurro, A.; Gallas, Quentin; Garnier, Éric; Merlen, Alain; Pernod, Philippe

doi:10.1109/jsen.2021.3110304

Cited by 3 publications

(3 citation statements)

References 18 publications

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“…Since its invention, the quest for wider dynamic range, power efficiency, and improved sensitivity has been active [8][9][10][11][12][13][14][15]. Different approaches based on structural and dimensional optimizations were proposed for improving the gauge performance [9].…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore [13], characterized the complementary metal-oxide-semiconductor (CMOS) readout-based transient response to exploit the gauge performance beyond atmospheric pressure. While the series microbridge proposed in [14] extended the dynamic range in the high-pressure regime, the lower detection was limited to 10 kPa. A capping wafer was introduced to further improve the gaseous conduction which ultimately increased the dynamic range [15].…”

Section: Introductionmentioning

confidence: 99%

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Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

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An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical estimation of the transition pressure corresponding to different gaseous conduction gaps is also presented. Depending on the available margin of gap tuning, the electromechanical and electrothermal analyses are carried out in COMSOL Multiphysics. The analytical approach is validated by experimentally characterizing the fabricated device. The experimentally tested device with the proposed actuation mechanism shows an 11.2 dB increase in dynamic range in comparison to the conventional design. In a CMOS-compatible fabrication process flow, the proposed gauge can be used to monitor vacuum from 40 Pa to 5×10^5 Pa with the electrostatic actuation.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

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show abstract

“…Thermal vacuum sensors, which are normally called Pirani sensors, are based on the principle that heat transfer between two surfaces is proportional to the pressure when the mean free path of gas molecules is larger than the distance between the surfaces [1,2]. With the development of micromachining technology, the microelectromechanical systems (MEMS) thermal vacuum sensors demonstrate advantages of small size, fast response and low power consumption.…”

Section: Introductionmentioning

confidence: 99%

A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 × 10−3 to 3 × 104 Pa and from 1.7 × 10−2 to 4.4 × 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 × 10−3 to 6.9 × 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 × 300 μm2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

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An improved reconstruction method of the reflected dynamic pressure in shock tube system based on inverse sensing model identification

Yao,

Li,

Shi

et al. 2024

Aerospace Science and Technology

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High Temperature Gradient Pirani Micro-Sensor Designed and Tested for Aerodynamic Wall Pressure Measurement

Cited by 3 publications

References 18 publications

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

A combined MEMS thermal vacuum sensor with a wide pressure range

An improved reconstruction method of the reflected dynamic pressure in shock tube system based on inverse sensing model identification

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