Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range
Manu Garg,
Dhairya Singh Arya,
Sushil Kumar
et al.
Abstract:An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical est… Show more
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