High-sensitivity parametrically amplified chemo-mechanical vapor sensors

Pandey, Shashank; Banerjee, Niladri; Banerjee, Aishwaryadev; Hasan, Nazmul; Kim, H.; Mastrangelo, Carlos H.

doi:10.1109/icsens.2015.7370582

Cited by 8 publications

(9 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To ensure low-noise and high-fidelity electrical signals, tunneling current measurements were performed in a dark room, inside an electrically shielded enclosure using the Keithley Parameter Analyzer. Instantaneous breakdown voltages of each of these devices were experimentally determined using a simple voltage ramp-up test as described in [22], where the biasing voltage across the Au electrodes was increased at a constant ramp-up rate until the dielectric stack suddenly began to conduct electricity.…”

Section: Methodsmentioning

confidence: 99%

“…In this article, we introduce a new batch-fabrication method of nanogap tunneling junctions and we perform an exhaustive characterization of the uniformity of the spacer layer, inspect tunneling current characteristics, and determine the potential barrier of the thin spacer layer as well as the maximum operating voltage for the device. Molecular devices based on this construction method have been previously used as tunneling chemiresistors for bio sensing [15,16,17,18] and are potential candidates for low-power consumption gas sensing devices [19,20,21,22]. The nanogap electrodes are chemically functionalized by coating them with a self-assemble-monolayer (SAM) of thiol molecules.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

et al. 2019

View full text Add to dashboard Cite

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer layer of sputtered α-Si and Atomic Layer Deposited (ALD) SiO2. A ~10 nm wide air-gap is formed along the sidewall by a controlled dry etch of the spacer. The thickness of the spacer layer can be tuned by adjusting the number of ALD cycles. The rigorous statistical characterization of the ultra-thin spacer films has also been performed. We fabricated nanogap electrodes under two design layouts with different overlap areas and spacer gaps, from ~4.0 nm to ~9.0 nm. Optical measurements reported an average non-uniformity of 0.46 nm (~8%) and 0.56 nm (~30%) in SiO2 and α-Si film thickness respectively. Direct tunneling and Fowler–Nordheim tunneling measurements were done and the barrier potential of the spacer stack was determined to be ~3.5 eV. I–V measurements showed a maximum resistance of 46 × 103 GΩ and the average dielectric breakdown field of the spacer stack was experimentally determined to be ~11 MV/cm.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

et al. 2019

View full text Add to dashboard Cite

show abstract

“…Kim et al have recently developed a novel sensing technique for highly sensitive biosensing based on the quantum-tunneling effect using nanogap break-junctions [225]- [233]. Furthermore, Mastrangelo et al have also been responsible for developing zero-power and highly-sensitive polymeric sensors for VOC detection [234]- [240].…”

Section: Low-power Sensors For Internet Of Thingsmentioning

confidence: 99%

Nanotechnology for Biosensors: A Review

Banerjee

Maity²,

Mastrangelo³

2021

Preprint

View full text Add to dashboard Cite

Biosensors are essential tools which have been traditionally used to monitor environmental pollution, detect the presence of toxic elements and biohazardous bacteria or virus in organic matter and biomolecules for clinical diagnostics. In the last couple of decades, the scientific community has witnessed their widespread application in the fields of military, health care, industrial process control, environmental monitoring, food-quality control, and microbiology. Biosensor technology has greatly evolved from the in vitro studies based on the biosensing ability of organic beings to the highly sophisticated world of nanofabrication enabled miniaturized biosensors. The incorporation of nanotechnology in the vast field of biosensing has led to the development of novel sensors and sensing mechanisms, as well as an increase in the sensitivity and performance of the existing biosensors. Additionally, the nanoscale dimension further assists the development of sensors for rapid and simple detection in vivo as well as the ability to probe single-biomolecules and obtain critical information for their detection and analysis. However, the major drawbacks of this include, but are not limited to potential toxicities associated with the unavoidable release of nanoparticles into the environment, miniaturization induced unreliability, lack of automation, and difficulty of integrating the nanostructured-based biosensors as well as unreliable transduction signals from these devices. Although the field of biosensors is vast, we intend to explore various nanotechnology enabled biosensors as part of this review article and provide a brief description of their fundamental working principles and potential applications.

show abstract

“…High signal to noise ratio can be realized in such devices using parametric amplification while maintaining small transducer size and low power consumption by exploiting the voltage induced lateral instability in Micro-Electro-Mechanical Systems (MEMS) devices to magnify their displacement to capacitance sensitivity. This technique has been previously reported to improve the performance of a MEMS magnetometer [19], gyroscope [25], hair-flow sensor [26], and vapor sensors [27,28,29]. Unlike electronic amplification, parametric amplification has an inherent advantage of providing higher sensitivity in MEMS sensor systems, as it amplifies the sensor signal without adding any extra electronic noise to the circuit.…”

Section: Introductionmentioning

confidence: 99%

Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

Likhite

Banerjee

Majumder

et al. 2019

Sensors

View full text Add to dashboard Cite

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25–85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip.

show abstract

High-sensitivity parametrically amplified chemo-mechanical vapor sensors

Cited by 8 publications

References 9 publications

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

Nanotechnology for Biosensors: A Review

Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor

Contact Info

Product

Resources

About