High-resolution monitoring of the hole depth during ultrafast laser ablation drilling by diode laser self-mixing interferometry

Mezzapesa, Francesco P.; Ancona, Antonio; Sibillano, Teresa; Lucia, Francesco De; Dabbicco, Maurizio; Lugarà, Pietro Mario; Scamarcio, Gaetano

doi:10.1364/ol.36.000822

Cited by 44 publications

(28 citation statements)

References 17 publications

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“…16 Being an offline measurement strategy, this method does not give the possibility to compensate the processing deviations. More recently, faster techniques based on Fourier domain optical coherence tomography (OCT) [17][18][19] and self-mixing interferotmetry (SMI) [20][21][22] have been proposed as solutions for ablation depth monitoring. Both of the techniques allow high speed measurement by providing data over only a single dimension, which is depth.…”

Section: Introductionmentioning

confidence: 99%

Application of self-mixing interferometry for depth monitoring in the ablation of TiN coatings

Demir

Previtali

Magnani

et al. 2015

Journal of Laser Applications

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Among possible monitoring techniques, self-mixing interferometry stands out as an appealing option for online ablation depth measurements. The method uses a simple laser diode, interference is detected inside the diode cavity and measured as the optical power fluctuation by the photodiode encased in the laser diode itself. This way, self-mixing interferometry combines the advantages of a high resolution point displacement measurement technique, with high compactness and easiness of operation. For a proper adaptation of self-mixing interferometry use in laser micromachining to monitor ablation depth, certain optical, electronical, and mechanical limitations need to be overcome. In laser surface texturing of thin ceramic coatings, the ablation depth control is critically important to avoid damage by substrate contamination. In this work, self-mixing interferometry was applied in the laser percussion drilling of TiN coatings. The ∼4 μm thick TiN coatings were drilled with a 1 ns green fiber laser, while the self-mixing monitoring was applied with a 785 nm laser diode. The limitations regarding the presence of process plasma are discussed. The design criteria for the monitoring device are explained. Finally, the self-mixing measurements were compared to a conventional optical measurement device. The concept was validated as the measurements were statistically the same

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Section: Introductionmentioning

confidence: 99%

Application of self-mixing interferometry for depth monitoring in the ablation of TiN coatings

Demir

Previtali

Magnani

et al. 2015

Journal of Laser Applications

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show abstract

“…The technique was shown to perform with 6.2-μm depth and 100-ns time resolution. On the other hand, self-mixing interferometry (SMI) is another appealing option as a high-resolution point displacement measurement technique [19], which can be adapted in laser micromachining to monitor ablation depth [20]- [22]. The depth resolution is intrinsically high, since it is half the wavelength of the interferometer (typically λ/2 < 0.5 μm).…”

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confidence: 99%

Evaluation of Self-Mixing Interferometry Performance in the Measurement of Ablation Depth

Demir

Colombo

Norgia

et al. 2016

IEEE Trans. Instrum. Meas.

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Abstract-This paper studies self-mixing interferometry (SMI) for measuring ablation depth during laser percussion drilling of TiAlN ceramic coating. The measurement performance of SMI was investigated in a large processing range producing blind microholes with depths below and beyond the average coating thickness. Signal characteristics of the measurement system were evaluated indicating sources of disturbance. The SMI measurements were compared with a conventional measurement device based on focus variation microscopy to evaluate the measurement error. The measurement error classes were defined, as well as defining the related error sources. The results depict that the measurement error was independent of the processing condition, hence the hole geometry and ablation rate. For 76% of cases, measurement error was below the intrinsic device resolution obtainable by simple fringe counting of half a wavelength (λ/2 = 0.393 μm).

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“…Furthermore, these approaches are fundamentally limited by the multitude of inevitably uncontrolled variables present in heterogeneous materials or high-volume manufacturing environments. Many researchers [9][10][11][12][13][14][15][16] have made steps to avoid this lengthy and costly search;…”

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confidence: 99%

“…they have aspired to observe laser processing in situ, both to understand the interactions and to achieve the "so-far elusive goal" [11] of online process control. The challenge has been to find an imaging technique which is as versatile as laser processing and yet still overcomes several unique challenges.…”

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confidence: 99%

Automatic laser welding and milling with in situ inline coherent imaging

et al. 2014

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Received Month X, XXXX; revised Month X, XXXX; accepted Month X, XXXX; posted Month X, XXXX (Doc. ID XXXXX); published Month X, XXXX Though new affordable high power laser technologies make possible many processing applications in science and industry, depth control remains a serious technical challenge. Here we show that inline coherent imaging, with line rates up to 312 kHz and microsecond-duration capture times, is capable of directly measuring laser penetration depth in a process as violent as kWclass keyhole welding. We exploit ICI's high speed, high dynamic range and robustness to interference from other optical sources to achieve fully automatic, adaptive control of laser welding as well as ablation, achieving micron-scale sculpting in vastly different heterogeneous biological materials.

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High-resolution monitoring of the hole depth during ultrafast laser ablation drilling by diode laser self-mixing interferometry

Cited by 44 publications

References 17 publications

Application of self-mixing interferometry for depth monitoring in the ablation of TiN coatings

Application of self-mixing interferometry for depth monitoring in the ablation of TiN coatings

Evaluation of Self-Mixing Interferometry Performance in the Measurement of Ablation Depth

Automatic laser welding and milling with in situ inline coherent imaging

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