High-resolution micro-grating accelerometer based on a gram-scale proof mass

Gao, Shan; Zhou, Zhen; Deng, Keke; Feng, Lishuang

doi:10.1364/oe.27.034298

Cited by 17 publications

(10 citation statements)

References 23 publications

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“…The diffractive optics , refer to the optical elements with operation principles based on the diffraction of the light. Enabled by the micro-fabrication technologies, vast optical elements based on diffractive microstructures are demonstrated, such as micro-gratings, , diffractive lenses, , Fresnel zone planes, diffractive diffusers, phase corrector plates, etc ., which are often referred to as diffractive optical elements (DOEs). Diffractive grating, one of the most widely used optical components, has already been miniaturized for microspectrometers and sensors. , Figure a shows an interesting work using a refractive index sensor based on a micro-grating from a digital video disc (DVD), which functions as an extension device of the smartphone .…”

Section: Summary Of Micro/nano-optics-based Sensorsmentioning

confidence: 99%

“…This design can be adapted for microspectrometer applications since infrared light sources and cameras have now been integrated into the latest models of smartphones, which shows promising applications in biosensors and point-of-care health monitors. Displacement sensors can also be realized by micro-gratings . The diffraction efficiencies of the micro-gratings depend on the interference properties of the light wave, which is highly sensitive to the distance between the micro-grating structures and a proof mass with a reflective surface.…”

Section: Summary Of Micro/nano-optics-based Sensorsmentioning

confidence: 99%

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Metasurface Micro/Nano-Optical Sensors: Principles and Applications

et al. 2022

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Metasurfaces are 2D artificial materials consisting of arrays of metamolecules, which are exquisitely designed to manipulate light in terms of amplitude, phase, and polarization state with spatial resolutions at the subwavelength scale. Traditional micro/nano-optical sensors (MNOSs) pursue high sensitivity through strongly localized optical fields based on diffractive and refractive optics, microcavities, and interferometers. Although detections of ultra-low concentrations of analytes have already been demonstrated, the label-free sensing and recognition of complex and unknown samples remain challenging, requiring multiple readouts from sensors, e.g., refractive index, absorption/emission spectrum, chirality, etc. Additionally, the reliability of detecting large, inhomogeneous biosamples may be compromised by the limited near-field sensing area from the localization of light. Here, we review recent advances in metasurface-based MNOSs and compare them with counterparts using micro-optics from aspects of physics, working principles, and applications. By virtue of underlying the physics and design flexibilities of metasurfaces, MNOSs have now been endowed with superb performances and advanced functionalities, leading toward highly integrated smart sensing platforms.

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Section: Summary Of Micro/nano-optics-based Sensorsmentioning

confidence: 99%

Section: Summary Of Micro/nano-optics-based Sensorsmentioning

confidence: 99%

Metasurface Micro/Nano-Optical Sensors: Principles and Applications

et al. 2022

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“…Since the low thermal expansion coefficient of the grating on a quartz substrate, grating interferometers have the features of high reliability, high sensitivity, and small zero deviation drift. In recent years, researchers have applied grating interferometers to acceleration sensors and obtained good results [17][18][19][20][21][22][23][24]. In order to further improve the performance of the grating accelerometer, the acceleration and displacement sensing element of the elastic coefficient, the mass block, and the cross-axis suppression ratio needs to be further optimized.…”

Section: Introductionmentioning

confidence: 99%

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

Wang

et al. 2021

Sensors

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The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

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“…This improved the sensitivity and reduced the cross-axis sensitivity of the MOEMS accelerometer. The measured NEA can reach down to 40 . However, its proof mass center of gravity does not coincide with the beam plane, so that the cross-axis sensitivity is still large.…”

Section: Grating Interferometric Cavity Schemementioning

confidence: 92%

“…45 , (e) ref. 40 , IEEE. FBG based accelerometer is a good candidate for the building and infrastructure monitoring due to its capability of multi-point measurement.…”

Section: Fiber Bragg Grating Schemementioning

confidence: 99%

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Wang

et al. 2021

OEA

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Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.

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High-resolution micro-grating accelerometer based on a gram-scale proof mass

Cited by 17 publications

References 23 publications

Metasurface Micro/Nano-Optical Sensors: Principles and Applications

Metasurface Micro/Nano-Optical Sensors: Principles and Applications

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

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