High rate growth of nanocrystalline diamond films using high microwave power and pure nitrogen/methane/hydrogen plasma

Investigation of bonded hydrogen defects in nanocrystalline diamond films grown with nitrogen/methane/hydrogen plasma at high power conditions

“…1, a large amount of grain boundaries due to the fine grain structure indeed exist in the N-doped NCD films. In addition, Raman spectra of the N-doped NCD films [28] have also shown the broadening of the diamond Raman peak at 1332 cm -1 , indicating the presence of diamond lattice defects, and a broad absorption band around 1500 cm -1 due to the coexistence of non-diamond component in the films. Furthermore, it has also been shown that nano-diamond crystals contain a high density of lattice defects such as stacking fault, and twin boundaries besides the high density of grain boundaries by TEM inspection [31].…”

“…The deposition time was 5.25 hour for sample ND1, 5.58 hour for ND2 and 4.67 hour for ND3. The detailed identification of the NCD nature of the samples by Raman spectroscopy and XRD has been reported [28]. For convenience of comparison and discussion, some growth parameters of the samples such as microwave power and the amount of N 2 are listed in Table 1 together with some characteristics of the diamond films, such as average grain size, growth rate, and film thickness, which was measured by optical microscopy using a micrometer ruler, with an error about ±10 μm due to non-homogeneity in film thickness coming from the growth process as well.…”

“…It is well-known that in comparison with low power (<3 kW) microwave plasma CVD (MPCVD), high pressure high power MPCVD systems are efficient for producing high quality diamond films of high uniformity, large area and high growth rate [23][24][25][26][27]. Therefore, previously we have explored the advantages of high power plasma to achieve fast fabrication of N-doped NCD films using conventional 4% CH 4 /H 2 / plasma through only a small amount of N 2 addition 4 [28]. In this work we investigate the impact of the growth parameters such as high microwave power and the amount of nitrogen addition on the formation of hydrogen defects for the first time in such N-doped NCD films grown with pure N 2 /CH 4 /H 2 / plasma.…”

Properties, mechanism and applications of diamond as an antibacterial material

“…The diamond film grain size, which can be tailored through different parameters [190,283,284], is also of interest in terms of antibacterial properties, as shown by Medina et al They compared the antibacterial properties of two kinds of diamond films with different grain sizes against other interesting antibacterial materials such as silver, copper, stainless steel, and polyethylene. The two chosen diamond films textures are based on the grain size.…”

Effect of the N/C Ratios of Ammonia Added to Process Gas Mixtures on the Morphology and Structure of MPCVD Diamond Films

“…Thus, many studies have investigated the effects of N addition on the growth and structure of diamond films. The findings of the studies indicate that N addition can lead to a high growth rate of the films [8][9][10], but a low deposition efficiency [11,12]. However, many different results have been reported regarding the influence of N addition on the film morphology and the diamond quality, with reports of N addition benefiting the growth of the (100) facet surface [9,11,[13][14][15][16][17][18], producing films without any preferred orientation of the surface facets [12,19,20] and improving diamond quality [13,16,21] or leading to a higher sp 2 fraction in the deposited material [19,20].…”