“…A two step method using InAs prelayer grown under In rich environment [4], or a graded buffer layer (InGaAs, InAlAs, GaInAlAs) [5,6], or a Te covered GaAs surface [7], have showed a clear improvement of the physical properties of active InAs layer. Substrate orientation and growth parameters were found to change the energy of surface reconstructions, the kinetics of adsorption, migration and desorption of adatoms [8][9][10][11][12]. Indeed, growth at lower temperatures or under low V/III ratio eliminated the multiple tilting of InAs crystal planes giving rise to InAs films aligned with their substrates [13].…”