High-precision laser microcutting and laser microdrilling using diffractive beam-splitting and high-precision flexible beam alignment

Feasibility assessment of parallelized helical drilling

“…Beam delivery systems that address this problem are those that solve the parallelization of laser material processes. These systems [52][53][54][55][56][57] consist of multiple active scan systems (or even phase modulators) and/or passive elements (such as diffractive beam splitters/shapers) that are then superimposed to generate the desired effect, such as a parallelized scanning or drilling process, 25,52,53 or scanning with beam shaping. 54,55,57 This superposition is necessary because there is currently no single technology or element that can provide the required functionality in one package.…”

“…In contrast, simultaneous parallelization by conventional beam-splitting, 25 as shown in Fig. 1(b), leads to a reduction of the achievable depth by reducing the peak fluence impinging on the individual boreholes, and only has a minor impact on particle shielding effects, which depend primarily on the pulse repetition rate 21 , 23 , 26 , 27 .…”

“…A reduction of the pulse repetition rate incident on the individual holes, and the consequently increased spatial separation of the pulses within each hole, reduces heat accumulation effects 8,9 and particle shielding, [19][20][21][22] which is pronounced in drilling processes 21,23 and has no impact on the achievable depth of the borehole. 24 In contrast, simultaneous parallelization by conventional beam-splitting, 25 as shown in Fig. 1(b), leads to a reduction of the achievable depth by reducing the peak fluence impinging on the individual boreholes, and only has a minor impact on particle shielding effects, which depend primarily on the pulse repetition rate.…”

A New Trajectory Planning Approach With Motion Duration Control for Kinematic Constrained Systems

“…Besides that, a F-Theta lens was attached to the scanner to focus the laser beam onto a planar image plane, which improves the process. The DBS provides the system with a multibeam matrix that is used to parallelize processing yielding a higher machine productivity [22], [23].…”