“…Involving the fastest scanning techniques, for example, the application of polygon scanners, acousto-optic beam deflection or sample rotation, has several limitations, such as dead processing time, low deflection angle, sample geometry specification and others. At higher laser surface scanning speeds, it becomes more and more difficult to maintain the high precision of LST, due to the synchronization loop between the laser and the scanning system [ 9 , 10 , 11 ]. The application of high-frequency lasers with ultrashort laser pulses meets the physical limitations of LST, such as heat accumulation between laser pulses and ablated plasma shielding effects [ 12 , 13 , 14 , 15 , 16 ].…”