“…However, the use of very high repetition rate, (MHz), high power, low pulse energy laser systems requiring fast, accurate scanners and tight synchronisation can improve this situation greatly [12]. In the present work, single beam patterning with a low NA lens requires a few mJ's to evaporate the Aluminium film whose thickness is only a few times the optical penetration depth ( l opt $ 7 nm at λ¼532 nm).…”