2015
DOI: 10.1109/led.2015.2462745
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High-Performance Poly-Si Thin-Film Transistor With High-<inline-formula> <tex-math notation="LaTeX">$k$ </tex-math></inline-formula> ZrTiO<sub>4</sub> Gate Dielectric

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Cited by 22 publications
(5 citation statements)
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“…were developed and a steep SS was successfully realized, reaching up to 60 mV/dec (Fig. 6)666768697071. However, a larger dielectric constant is needed to reach 60 mV/dec.…”
Section: Resultsmentioning
confidence: 99%
“…were developed and a steep SS was successfully realized, reaching up to 60 mV/dec (Fig. 6)666768697071. However, a larger dielectric constant is needed to reach 60 mV/dec.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, figure 10 gives the simulation results of dependence of BV and R on,sp on the permittivity ε D . The permittivity values of 25, 50, 80, and 100 are corresponding to the high-k materials of HfO 2 , [17] ZrTiO 4 , [18] TiO 2 , [19] 10. Dependences of BV and R on,sp on ε D for the HKSD devices with different L d .…”
Section: Optimizations and Discussionmentioning
confidence: 99%
“…The a-Si TFTs offer small electron mobilities (<1 cm 2 /Vs), and thus low switching speed [9]. The other hand, poly-Si TFTs are devices with high performance, but they are fabricated at higher temperatures (500-600 • C) [10][11][12], while IGZO TFTs have moderate mobilities (>10 cm 2 /Vs) and low temperature of fabrication [13]. However, this semiconductor is only used for the fabrication of n-type devices, for p-type is used a different semiconductor, such as SnO [14].…”
Section: Introductionmentioning
confidence: 99%