2001
DOI: 10.1109/5.929646
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High-performance interconnects: an integration overview

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Cited by 282 publications
(134 citation statements)
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“…It is, instead, the interface between the two dissimilar metals that dominates the total resistance. At present, tungsten is used as a chip-level interconnect in complementary metal-oxide-semiconductor (CMOS) circuits (5,29) in contact with copper, an FCC metal where conductance is dominated by slike modes (30). These findings suggest that, as semiconductor devices shrink farther to ballistic scales, counterintuitive interface effects are liable to dominate device resistance, particularly for metals with dissimilar electronic structure.…”
Section: Discussionmentioning
confidence: 99%
“…It is, instead, the interface between the two dissimilar metals that dominates the total resistance. At present, tungsten is used as a chip-level interconnect in complementary metal-oxide-semiconductor (CMOS) circuits (5,29) in contact with copper, an FCC metal where conductance is dominated by slike modes (30). These findings suggest that, as semiconductor devices shrink farther to ballistic scales, counterintuitive interface effects are liable to dominate device resistance, particularly for metals with dissimilar electronic structure.…”
Section: Discussionmentioning
confidence: 99%
“…The performance of ICs in advanced technology nodes is dominated by the interconnect delay [Havemann and Hutchby 2001]. Migrating to 3D ICs, we can envisage reduced interconnect delay and chip area which is achieved by placing the logic gates, on the critical path, very close to each other using multiple active layers.…”
Section: Introductionmentioning
confidence: 99%
“…1 A major obstacle preventing this growth from continuing is the limited onboard bandwidth provided by electrical interconnects. 2 The move to low loss copper lines from aluminium and the development of superior interconnect protocols has stretched the lifetime of the these interconnects. 3 However, a long term solution is needed to allow for the bandwidth which will be required in the future.…”
Section: Introductionmentioning
confidence: 99%