High-performance blazed GxL<sup>TM</sup>device for large-area laser projector

Ito, Yasuyuki; Saruta, Kunihiko; Kasai, Hiroto; Nishida, Mizuhiko; Yamaguchi, Masanari; Yamashita, Keitaro; Taguchi, A.; Oniki, Kazunao; Tamada, H.

doi:10.1117/12.645463

Cited by 10 publications

(14 citation statements)

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“…A GxL device is a simple one-dimensional grating as shown in Fig. 2 and is fabricated using 0.25-µm CMOS-compatible fabrication processing and planarization techniques 6 which are common in silicon surface micromachining. The structure and principle of a blazed GxL is shown in Fig.…”

Section: Flat Gxl Vs Blazed Gxlmentioning

confidence: 99%

“…And the shape of the ribbon strongly affects diffraction efficiency. [5][6][7] Blazed GxL ribbon has three important factors for gaining higher efficiency; the bow, the tilt, and the gap width. The bow is a distortion of ribbons as shown in Fig.…”

Section: Optimization Of Tilt and Bowmentioning

confidence: 99%

“…ultra-wide high-definition screen. [5][6][7][8][9] As though gazing through a giant window, visitors enjoyed watching the earth and the current state of human living, with a fidelity never seen before.…”

Section: Introductionmentioning

confidence: 99%

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Invited Paper: Blazed GxLP™ light modulators for laser projectors

Tamada

2007

J Soc Info Display

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Abstract— A GxL device is a one‐dimensional light modulator suitable for laser projectors. A blazed GxL, which diffracts the incident laser beam in only one direction was developed, and a contrast ratio of 10,000:1 and a diffraction efficiency of 70% was achieved by nanometer‐order control of ribbons based on the MEMS structural simulation and using common 0.25‐μm CMOS‐compatible fabrication processes. The 1.09‐in.‐long 1080‐pixel blazed GxL was implemented in the 2005‐in. Laser Dream Theater at the 2005 World Exposition in Aichi, Japan, and performed perfectly during that period. Recently, by optimizing the posts supporting the ribbon and flattening of the sacrificial layer using chemical mechanical polishing, an ultra high contrast ratio of 34,700:1 with a 0.72‐in.‐long GxL has been realized, and a smaller ceramic module with high reliability has also been realized. The blazed GxL will be a promising technology to further advance laser‐projector performance.

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Section: Flat Gxl Vs Blazed Gxlmentioning

confidence: 99%

Section: Optimization Of Tilt and Bowmentioning

confidence: 99%

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Invited Paper: Blazed GxLP™ light modulators for laser projectors

Tamada

2007

J Soc Info Display

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“…In addition, the optical response is wavelength sensitive, allowing for spectral filtering capabilities. D-MEMS have been commercialized in the fields of projection displays [2], spectroscopy [3] and direct printing-board writing [4]. The D-MEMS devices fabricated for these applications are based on creating a diffractive surface from a purely reflective surface.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, MEMS-based active spectroscopy has been investigated for lightweight, low power, active diffractive elements that are capable of achieving high spectral resolution for planetary spectroscopy. The advantage relative to other optical devices is its ability to multiplex and de-multiplex both in the actuation and non-actuation state [2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Optimization of diffractive MEMS for optical switching

Verheggen

Khan-Raja

Castracane

2007

Journal of Experimental Nanoscience

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Diffractive Micro-Electro-Mechanical Systems (D-MEMS) have enjoyed increased attention in the fields of communication, spectroscopy, projection display, and maskless lithography. Redirecting an optical signal into predefined angles, precisely balancing this optical signal, inherent wavelength filtering capability and high switching speed are some of the advantages over other optical MEMS. D-MEMS based on customized IC fabrication processes are being used to assemble system-level architectures for integration into mainstream circuitry. The goal of this work is to improve the optical performance while minimizing the power consumption and operational voltage. Operational characteristics of new D-MEMS have achieved a reduction of the optical switching voltage to 2V at a 6.5V bias. Structural modifications through variation in ruling/top-electrode width and spacing have been studied. An alternative structural material, polyimide, is being optimized for further decreasing the operating voltage of the D-MEMS devices.

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Blazed GxL™ device for laser dream theatre at the Aichi expo 2005

Ito¹,

Saruta²,

Kasai³

et al. 2007

Journal of Information Display

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A blazed GxL TM device is described as having high optical efficiency (> 70% for RGB lasers), and high contrast ratio (> 10,000:1), and that is highly reliable when used in a large-area laser projection system. It has a robust design and precise stress control technology to maintain a uniform shape (bow and tilt) of more than 6,000 ribbons, a 0.25-µm CMOS compatible fabrication processing and planarization techniques to reduce fluctuation of the ribbons, and a reliable Al-Cu reflective film that provided protection against a high-power laser. No degradation in characteristics of the GxL device is observed after operating a 5,000-lumen projector for 2,000 hours and conducting 2,000 temperature cycling tests at -20°C and +80°C. At the 2005 World Exposition in Aichi, Japan the world's largest laser projection screen with a size of 2005 inches (10 m × 50 m) and 6 million pixels (1,080 × 5,760) was demonstrated.

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High-performance blazed GxL^TMdevice for large-area laser projector

Cited by 10 publications

References 0 publications

Invited Paper: Blazed GxLP™ light modulators for laser projectors

Invited Paper: Blazed GxLP™ light modulators for laser projectors

Optimization of diffractive MEMS for optical switching

Blazed GxL™ device for laser dream theatre at the Aichi expo 2005

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High-performance blazed GxLTMdevice for large-area laser projector

Cited by 10 publications

References 0 publications

Invited Paper: Blazed GxLP™ light modulators for laser projectors

Invited Paper: Blazed GxLP™ light modulators for laser projectors

Optimization of diffractive MEMS for optical switching

Blazed GxL™ device for laser dream theatre at the Aichi expo 2005

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Product

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High-performance blazed GxL^TMdevice for large-area laser projector