High-performance and reliable elevated-metal metal-oxide thin-film transistor for high-resolution displays

P‐15: The Use of Fluorination to Enhance the Performance and the Reliability of Elevated‐Metal Metal‐Oxide Thin‐Film Transistors

“…As the edges of the channel region are self-aligned to those of the elevated metal electrodes, the shortest channel length (L) is determined by the minimum photolithographically defined separation (λ) between the electrodes. This is desirable for the realization of higher resolution displays [6].…”

24.3: Short‐Channel Indium‐Gallium‐Zinc Oxide Thin‐Film Transistor Enabled by Thermal Dehydrogenation and Oxidizing Defect‐Suppression

“…The transfer characteristics of the resulting TFTs, exhibiting complete elimination of the L-dependence of Von even down to L = 2 µm, as shown in Figure 4. Other relevant electrical parameters of this TFT with L = 2 µm are a field-effect mobility of ~6 cm 2 /Vs; an on/off ratio over 10 11 ; a subthreshold slope ~110 mV/decade; and a low widthnormalized leakage current of no more than 1 fA/µm [10]. With the SCE eliminated with dehydrogenating the PES, the merit of EMMO TFT on the device footprint can be furthest enhanced.…”

“…For conventional back-channel-etched (BCE) and the etch-stop (ES) architectures bottom-gate IGZO TFTs, the device performance is usually compromised for BCE TFTs because of damage to the channel layer or the device footprint is larger for ES TFTs because of the longer channel length (L). Enabled by the annealing-induced formation of conductive source/drain (S/D) regions in IGZO [7], [8], an elevated-metal metal-oxide (EMMO) architecture offering an ES-like protection of the channel region while maintaining a BCE-like small footprint has recently been proposed [9], [10]. Though an EMMO TFT ( Fig.…”

P‐9: Timing Model and Maximum‐Aperture Pixel Design of an Active‐Matrix Display

“…where = 3 and = 6 are constants representing engineering margins mandated by the design rules [10]. The for the third design is the largest, which makes it more desirable than the other two designs.…”