2014
DOI: 10.1088/0268-1242/29/8/084005
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High-output-power 255/280/310 nm deep ultraviolet light-emitting diodes and their lifetime characteristics

Abstract: 255/280/310 nm deep ultraviolet light-emitting diodes (DUV LEDs) suitable for high-current operation are reported. Newly developed 1 mm sized chips are installed in a commercial package with a two-series configuration. At a forward current of 350 mA, we measured powers of 45.2, 93.3, and 65.8 mW for the 255, 280, and 310 nm LEDs, respectively. The corresponding external quantum efficiencies per serial circuit were 1.3, 3.0, and 2.4%, and successful chip scalability was demonstrated. The 50% lifetime of the 280… Show more

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Cited by 91 publications
(55 citation statements)
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“…For optoelectronic devices like light emitting diodes (LEDs) or laser diodes operating in the ultraviolet (UV) range, semiconductors with a wide bandgap are important. Therefore, numerous groups work on aluminum nitride (AlN), aluminum gallium nitride (AlGaN), aluminum indium gallium nitride (AlInGaN), and on LEDs and lasers based on these semiconductors . The efficiency of these LEDs could recently be further increased because of the improvements in crystal quality of AlGaN layers with high Al content, and the use of AlN single crystals as substrates, which significantly reduce the dislocation density .…”
Section: Introductionmentioning
confidence: 99%
“…For optoelectronic devices like light emitting diodes (LEDs) or laser diodes operating in the ultraviolet (UV) range, semiconductors with a wide bandgap are important. Therefore, numerous groups work on aluminum nitride (AlN), aluminum gallium nitride (AlGaN), aluminum indium gallium nitride (AlInGaN), and on LEDs and lasers based on these semiconductors . The efficiency of these LEDs could recently be further increased because of the improvements in crystal quality of AlGaN layers with high Al content, and the use of AlN single crystals as substrates, which significantly reduce the dislocation density .…”
Section: Introductionmentioning
confidence: 99%
“…Semiconductors with wide bandgap are important for ultraviolet (UV) devices like light emitting diodes (LEDs) or laser diodes. Several groups published results on such UV LEDs based on aluminum nitride (AlN), aluminum gallium nitride (AlGaN), and aluminum indium gallium nitride (AlInGaN), . Recently, the performance of UV LEDs based on AlGaN could be increased due to the improved quality of AlGaN layers with high Al content, , .…”
Section: Introductionmentioning
confidence: 99%
“…By using the pulsed atomic layer epitaxy (PALE) approach discussed in Section 6, and an AlN/Al0.85Ga0.15N superlattice strain-relief buffer, output power levels of 10.2 mW at 1 A pulsed current and 1 mW at 100 mA CW current were achieved in LEDs emitting at 325 nm and grown on sapphire substrates. In recently developed high-power DUV LEDs, the AlN/AlGaN superlattice buffer approach was employed by several groups [4,16]. For example, the LEDs emitting at 278 nm with an EQE of 10.4% and an output power of 9.3 mW at 20 mA CW current utilized strainrelief AlN/AlGaN superlattices on 10 μm thick AlN layers by migration-enhanced metalorganic chemical vapor deposition (MEMOCVD) [4].…”
Section: Aln/algan Superlattice Buffermentioning
confidence: 99%
“…For example, the LEDs emitting at 278 nm with an EQE of 10.4% and an output power of 9.3 mW at 20 mA CW current utilized strain-relief AlN/AlGaN superlattices on 10 µm thick AlN layers by migration-enhanced metalorganic chemical vapor deposition (MEMOCVD) [4]. In 255, 280, and 310 nm DUV LEDs with output powers of 45.2, 93.3, and 65.8 mW and EQEs of 1.3%, 3.0%, and 2.4%, respectively, at 350 mA pulsed current, AlN/AlGaN superlattices were also implemented as a basic design strategy for strain-relief [16].…”
Section: Aln/algan Superlattice Buffermentioning
confidence: 99%