2012
DOI: 10.1134/s1063782612020236
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High-order diffraction gratings for high-power semiconductor lasers

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Cited by 8 publications
(2 citation statements)
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“…Furthermore, the combination of process steps required for these fine-featured, deep etched structures, with the fabrication required for other process steps increases fabrication complexity considerably if the performance of all components is to be maintained. While first-order gratings require e-beam lithography for most wavelengths of interest for integrated photonics, higher order gratings (N > 10) have been suggested for standalone lasers [10][11][12]. DBR periods above approximately 2 µm can be achieved using photolithography, which is already multiple order gratings for an operating wavelength, λ ∼ = 1.3 µm.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, the combination of process steps required for these fine-featured, deep etched structures, with the fabrication required for other process steps increases fabrication complexity considerably if the performance of all components is to be maintained. While first-order gratings require e-beam lithography for most wavelengths of interest for integrated photonics, higher order gratings (N > 10) have been suggested for standalone lasers [10][11][12]. DBR periods above approximately 2 µm can be achieved using photolithography, which is already multiple order gratings for an operating wavelength, λ ∼ = 1.3 µm.…”
Section: Introductionmentioning
confidence: 99%
“…The fabrication of first-order DBR (with a period of Λ≈0.15 nm) is associated with a complicated and expensive technology of electron beam lithography, which in the case of high power semiconductor lasers can be redundant. In order to search for more technological approaches to stabilization and narrowing of the laser spectrum, the issue of developing high-order DBR lasers (N10) is significant [11][12][13][14][15][16]. The high-order DBR period exceeds Λ>1.5 μm for a wavelength of λ∼1 μm, which allows someone to use photolithography, which is much cheaper and make it possible to fabricate a DBR over a large area (for example, a heterostructure with a diameter of 3 inches or more) without increasing time and process cost.…”
Section: Introductionmentioning
confidence: 99%