High Mobility Anisotropic Black Phosphorus Nanoribbon Field‐Effect Transistor

Abstract

Achieving excellent electrostatic control and immunity to short channel effects are the formidable challenges in ultrascaled devices. 3D device architectures, such as nanoribbon, have successfully mitigated these problems by achieving uniform top-and side-wall control of the channel. Here, by leveraging on the merits of 3D structure, high-mobility black phosphorus nanoribbon fieldeffect transistors (BPNR-FET) are demonstrated and the anisotropic transport properties are systematically investigated. A simple top-down reactive ion etching method is used to realize both armchair-and zigzag-oriented nanoribbons with various widths down to 60 nm. The mobility of BPNR-FET is found to be width-and thickness-dependent, with the highest hole mobility of ≈862 cm 2 V −1 s −1 demonstrated in armchair-oriented device at room temperature by combining high-κ gate dielectric and hydrogen treatment to reduce sidewall scattering. Furthermore, hydrogenation effectively passivates the nanoribbon dangling bonds, leading to hysteresis and contact resistance improvement. This work unravels the superior electrical performance underscore a conceptually new device based on BP nanoribbons, paving the way toward the development of nonplanar devices on 2D materials platform.simultaneously. This work demonstrates the potential of BPNR-FET as a high-performance p-type transistor in addition to the nanoribbon FET family which includes not only graphene and transition metal dichalcogenides (TMDs), but also group-IV, III-V compounds, and some heterojunctions.

Black Phosphorus, a Rising Star 2D Nanomaterial in the Post‐Graphene Era: Synthesis, Properties, Modifications, and Photocatalysis Applications

“…Owing to the outstanding physical and chemical property of BP as a rising star, BP has been applied in many fields such as batteries anodes, selective sensors, and field‐effect transistors, and these applications have been reviewed by many articles . Apart from aforesaid applications, BP, as a promising photocatalyst, has been applied in the field of photocatalysis for solar‐to‐energy conversion, photocatalytic carbon dioxide reduction, photocatalytic hydrogenation, environmental pollutants treatment, solar‐driven nitrogen fixation and antibacterial application, and cancer treatments.…”

“…In the past few years, there are many articles that have reported the practical application of BP in batteries, photodetectors, sensors, field‐effect transistors, and solar cells, and these applications have been summarized in some reviews . Meanwhile, many papers have reported the application of photocatalysis field, while there is no article that has detailedly reported that BP as a photocatalyst is employed in various aspects.…”

Synergistically Coupling Black Phosphorus Quantum Dots with MnO2 Nanosheets for Efficient Electrochemical Nitrogen Reduction Under Ambient Conditions

“…Black phosphorus (BP), a typical 2D nonmetallic material and the most stable allotrope of phosphorus, emerges as a multifunctional material in lithium‐ion battery, overall water splitting and field‐effect transistor, due to superior activity, excellent carrier mobility and low cost. [ 18–21 ] Considering that the valence electron structure of BP (3s 2 3p 3 ) is quite similar to that of N 2 (2s 2 2p 3 ) and BP owns an anisotropic lattice structure, substantial electrochemical NRR potential can be anticipated. [ 22–24 ] However, most proposed BP‐based electrocatalysts hardly exploit the entire catalytic potential of BP under the condition of 2D lamellar bulk phase.…”

Etching Techniques in 2D Materials

“…H‐radicals attack the carbon atoms at both edges and at surface defects and methane is the main product of the reaction. Argon plasma also etches TMDs and black phosphorene (BP), but the inert gases remove material by physical bombardment with low etching rate . The mixed plasma of SF 6 and N 2 etches TMDs such as MoS 2 , and the resulting products are gaseous .…”