High-<i>Q</i> silicon optomechanical microdisk resonators at gigahertz frequencies

Sun, Xiankai; Zhang, Xufeng; Tang, Hong X.

doi:10.1063/1.4709416

Cited by 79 publications

(56 citation statements)

References 20 publications

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“…In the vicinity of this anti-crossing a drop in the Q is observed. 23,24 A more complete sinusoidal dependence of Q on h is shown in Fig. 3(c) and indicates the crucial role of the standing wave formation in the lower pedestal.…”

mentioning

confidence: 89%

Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Nguyen

Baker

Hease

et al. 2013

Applied Physics Letters

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We report on optomechanical GaAs disk resonators with ultrahigh quality factor -frequency product Q • f . Disks standing on a simple pedestal exhibit GHz breathing modes attaining a Q • f of 10 13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation in this configuration. A new type of disk resonator integrating a shield within the pedestal is then proposed and its working principles and performances investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss-limited Q reaches 10 7 − 10 9 corresponding to Q • f of 10 16 − 10 18 . This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.

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mentioning

confidence: 89%

Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Nguyen

Baker

Hease

et al. 2013

Applied Physics Letters

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“…This makes GaAs disks currently amongst the most strongly coupled optomechanical platforms in the solid state, together with silicon-based photonic crystals. Silicon disk resonators of similar size also show a very good level of coupling [25,26] but do not benefit optimally from photoelastic effects because of the reduced symmetry of the photoelastic tensor of silicon and its smaller constants.…”

Section: Optomechanical Coupling In Gaas Disk Resonatorsmentioning

confidence: 93%

Gallium Arsenide Disks as Optomechanical Resonators

Favero

2014

Cavity Optomechanics

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The interaction of light with mechanical motion-optomechanics [1][2][3][4]-is now investigated in a wide variety of experimental settings. In the last years, the field also benefited from the advances of nanophotonics. We discuss here the merits of Gallium Arsenide (GaAs) optomechanical disk resonators, which bring together high mechanical frequency, ultra-strong optomechanical coupling and low optical/mechanical dissipation. Based on a relatively simple geometry, these miniature optomechanical resonators permit a complete on-chip optical integration, a natural interfacing with optically active elements and the combination with optoelectronics architectures typical of III-V semiconductors.

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“…By reducing the device size it becomes possible to operate at frequencies in the GHz regime where air damping is negligible [82,88,96] and even interfacing integrated optomechanics with microfluidics becomes possible [113]. The use of mechanical degrees of freedom enables tunable optical elements and might in the future be interfaced with the sensor concepts discussed in Section 5.3.…”

Section: Driving Mechanical Motion By Optical Forcesmentioning

confidence: 98%

Diamond as a material for monolithically integrated optical and optomechanical devices

Rath

Ummethala

Nebel

et al. 2015

Physica Status Solidi (a)

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Diamond provides superior optical and mechanical material properties, making it a prime candidate for the realization of integrated optomechanical circuits. Because diamond substrates have matured in size, efficient nanostructuring methods can be used to realize full-scale integrated devices. Here we review optical and mechanical resonators fabricated from polycrystalline as well as single crystalline diamond. We present relevant material properties with respect to implementing optomechanical devices and compare them with other material systems. We give an overview of diamond integrated optomechanical circuits and present the optical readout mechanism and the actuation via optical or electrostatic forces that have been implemented to date. By combining diamond nanophotonic circuits with superconducting nanowires single photons can be efficiently detected on such chips and we outline how future single photon optomechanical circuits can be realized on this platform

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High-Q silicon optomechanical microdisk resonators at gigahertz frequencies

Abstract: and suggests a realistic pedestal size to achieve the highest possible Q.

Cited by 79 publications

References 20 publications

Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Gallium Arsenide Disks as Optomechanical Resonators

Diamond as a material for monolithically integrated optical and optomechanical devices

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